Abstract: A mask is disclosed for use in forming a thin-layer pattern of an organic electroluminescence element having high-precision pixels. The mask is manufactured by wet-etching a (100) silicon wafer (single crystal silicon substrate) 1 in a crystal orientation-dependent anisotropic fashion so as to form through-holes 11 having (111)-oriented walls 11a serving as apertures corresponding to a thin-layer pattern to be formed.

Abstract: A porous structure in which water repellency can be kept for a long term; an inkjet recording head in which the nozzle surface is superior in water repellency properties, and high printing quality can be maintained for a long term; a method of manufacturing such a porous structure and such an ink-jet recording head; and an ink-jet recording apparatus provided with such an ink-jet recording head. In a porous structure (100), recess portions (17) and protrusion portions (18) are formed on the surface of a substrate of the porous structure. The height of the protrusion portions (18) on the surface of the substrate is uniform. In addition, the recess portions (17) and the protrusion portions (18) are formed to have such a size that a liquid drop (21) does not fall down into the recess portion (17), and can contact with an air layer (20) in the recess portion (17). The porous structure (100) is adopted in the ink ejecting surface except for ink ejecting holes in an ink-jet recording head.

Abstract: A structural member in which a super water-repellent function and high durability and scratch resistance can be obtained; and a method of manufacturing such a structural member. A water-repellent structure (100) consisting of appropriate irregularities comprising protrusion portions (18) uniform in height is formed on an external surface. The irregularities (17 and 18) have such dimensions that any droplet should not fall in a recess portion and the droplet is in contact with an air layer (20) in the recess portion (17).

Abstract: A method includes a step of attracting a glass substrate 20 that is a subject for deposition using the electrostatic attraction of a stage 1, a step of aligning the attracted glass substrate with a deposition mask 2, and a step of evaporating an organic compound that is a deposition material, used for forming electroluminescent elements so as to deposit the compound on the glass substrate 20. An electrostatic chucking function is provided to the deposition mask according to needs, whereby the adhesion is enhanced.

Abstract: A structural member in which a super water-repellent function and high durability and scratch assistance can be obtained; and a method of manufacturing such a structural member. A water-repellent structure (100) consisting of appropriate irregularities comprising protrusion portions (18) uniform in height is formed on an external surface. The irregularities (17 and 18) have such dimensions that any droplet should not fall in a recess portion and the droplet is in contact with an air layer (20) in the recess portion (17).

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Abstract: A mask is disclosed for use in forming a thin-layer pattern of an organic electroluminescence element having high-precision pixels. The mask is manufactured by wet-etching a (100) silicon wafer (single crystal silicon substrate) 1 in a crystal orientation-dependent anisotropic fashion so as to form through-holes 11 having (111)-oriented walls 11a serving as apertures corresponding to a thin-layer pattern to be formed.

Abstract: The present invention provides a mask for use in forming a thin-layer pattern of an organic electroluminescence element having high-precision pixels. The mask is manufactured by wet-etching a (100) silicon wafer (single crystal silicon substrate) in a crystal orientation-dependent anisotropic fashion so as to form through-holes having (111)-oriented walls serving as apertures corresponding to a thin-layer pattern to be formed.

Abstract: A porous structure in which water repellency can be kept for a long term; an inkjet recording head in which the nozzle surface is superior in water repellency properties, and high printing quality can be maintained for a long term; a method of manufacturing such a porous structure and such an ink-jet recording head; and an ink-jet recording apparatus provided with such an ink-jet recording head. In a porous structure (100), recess portions (17) and protrusion portions (18) are formed on the surface of a substrate of the porous structure. The height of the protrusion portions (18) on the surface of the substrate is uniform. In addition, the recess portions (17) and the protrusion portions (18) are formed to have such a size that a liquid drop (21) does not fall down into the recess portion (17), and can contact with an air layer (20) in the recess portion (17). The porous structure (100) is adopted in the ink ejecting surface except for ink ejecting holes in an ink-jet recording head.

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Abstract: A porous structure in which water repellency can be kept for a long term; an ink-jet recording head in which the nozzle surface is superior in water repellency properties, and high printing quality can be maintained for a long term; a method manufacturing such a porous structure and such an ink-jet recording head; and an ink-jet recording apparatus provided with such an ink-jet recording head. In a porous structure (100), recess portions (17) and protrusion portions (18) are formed on the surface of a substrate of the porous structure. The height of the protrusion portions (18) on the surface oft he substrate is uniform. In addition, the recess portions (17) and the protrusion portions (18) are formed to have such a size that a liquid drop (21) does not fall down into the recess portion (17), and can contact with an air layer (20) in the recess portion (17). The porous structure (100) is adopted in the ink ejecting surface except for ink ejecting holes in an ink-jet recording head.

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Abstract: A mask is disclosed for use in forming a thin-layer pattern of an organic electroluminescence element having high-precision pixels. The mask is manufactured by wet-etching a (100) silicon wafer (single crystal silicon substrate) 1 in a crystal orientation-dependent anisotropic fashion so as to form through-holes 11 having (111)-oriented walls 11a serving as apertures corresponding to a thin-layer pattern to be formed.

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Abstract: A manufacturing method for a device having an electrostatic actuator for example inkjet head, whereby warping of the diaphragms does not occur as a result of anodic bonding is provided. The method comprises the steps of etching a first substrate on the first surface thereof to form a concave portion and a diaphragm provided in bottom walls of the concave portion, forming an electrode on a second substrate, and anodically bonding the second substrate to a second surface of the first substrate, opposite the first surface, such that the electrode is aligned adjacent to the diaphragm with a gap therebetween. The bonding temperature of the anodically bonding step is set within a temperature range whereby the contraction of the first substrate after bonding is equal to or greater than the contraction of the second substrate.

Abstract: An ink jet recording apparatus capable of ejecting ink droplets in which the volume is precisely and easily controlled. The gradient of the pixel to be printed, based on a digital gradient input signal, is provided for printing high resolution gradient images using a low drive voltage in this ink jet head. More specifically, the ink jet recording apparatus of the present invention will include a diaphragm formed at one part of a wall of each independent ejection chamber, with electrodes formed opposite each diaphragm and spaced therefrom at a predetermined gap distance. Ink droplets are selectively ejected from nozzle openings in the ejection chamber by applying a voltage to generate an electrostatic force which momentarily deforms the diaphragm. Moreover, plurality of independent electrodes oppose each diaphragm and a pulse voltage is applied to a predetermined number of electrodes according to a gradient signal to eject ink droplets of a volume determined by the gradient signal.

Abstract: A laminated, multi-substrate ink jet head and methods creating the same, wherein the ink jet head includes nozzle holes, emitting chambers respectively led to the nozzle holes, diaphragms formed on a wall of the emitting chambers, a common ink cavity for supplying ink to the emitting chambers through orifices and electrodes placed so as to face to the diaphragms so as to drive the diaphragms by static electricity. The lower substrate which forms the electrodes may include a plurality of indentations for mounting the electrode therein to serve as a gap spacing element for respective diaphragm/electrode pairs when the head is assembled. Alternatively, areas immediately beneath the diaphragm may be etched away to expand the vibrating chamber to a predetermined gap distance, or a membrane of a predetermined thickness may interpose the respective diaphragm and electrode substrates.

Abstract: A laminated, multi-substrate ink jet head and methods creating the same, wherein the ink jet head includes nozzle holes, emitting chambers respectively led to the nozzle holes, diaphragms formed on a wall of the emitting chambers, a common ink cavity for supplying ink to the emitting chambers through orifices and electrodes placed so as to face to the diaphragms so as to drive the diaphragms by static electricity. The lower substrate which forms the electrodes may include a plurality of indentations for mounting the electrode therein to serve as a gap spacing element for respective diaphragm/electrode pairs when the head is assembled. Alternatively, areas immediately beneath the diaphragm may be etched away to expand the vibrating chamber to a predetermined gap distance, or a membrane of a predetermined thickness may interpose the respective diaphragm and electrode substrates.

Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.