Abstract: In order to provide a determining apparatus capable of determining whether there is a foreign substance on a substrate stage with suppressing a decrease in productivity of an apparatus, the determining apparatus according to the present invention is configured to determine a state of a surface of each of a first substrate stage and a second substrate stage based on a first detection result of a substrate surface of a substrate mounted on the first substrate stage and a second detection result of the substrate surface of the substrate mounted on the second substrate stage.

Abstract: An information processing apparatus configured to inspect a developed state of a substrate includes an inspection unit configured to input a captured image of a developed second substrate to a learning model to acquire inspection data that include information indicating a second developed state of the second substrate. The learning model is obtained by learning using learning data that include a captured image of a developed first substrate and information indicating a first developed state of the first substrate.