Patents by Inventor Mitsuru Koizumi
Mitsuru Koizumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11404238Abstract: There is provided a control method for an electron microscope including a thermionic-emission gun of self-bias type using a fixed bias resistor, an accelerating voltage power supply supplying an accelerating voltage to the thermionic-emission gun, and an optical system for irradiating a specimen with an electron beam. The control method includes: obtaining a value of a load current which is a current passing through an accelerating voltage power supply; determining a filament height of the thermionic-emission gun based on the value of the load current; and setting a condition of the optical system based on the filament height.Type: GrantFiled: September 9, 2020Date of Patent: August 2, 2022Assignee: JEOL Ltd.Inventor: Mitsuru Koizumi
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Publication number: 20210074506Abstract: There is provided a control method for an electron microscope including a thermionic-emission gun of self-bias type using a fixed bias resistor, an accelerating voltage power supply supplying an accelerating voltage to the thermionic-emission gun, and an optical system for irradiating a specimen with an electron beam. The control method includes: obtaining a value of a load current which is a current passing through an accelerating voltage power supply; determining a filament height of the thermionic-emission gun based on the value of the load current; and setting a condition of the optical system based on the filament height.Type: ApplicationFiled: September 9, 2020Publication date: March 11, 2021Inventor: Mitsuru Koizumi
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Patent number: 8158937Abstract: A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.Type: GrantFiled: August 24, 2009Date of Patent: April 17, 2012Assignee: JOEL Ltd.Inventors: Mitsuru Koizumi, Hidetoshi Nishiyama
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Patent number: 8119994Abstract: Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means for detecting a secondary signal produced from the sample in response to the beam irradiation, a partitioning plate for partially partitioning off the space between the film and the primary beam irradiation means in the vacuum chamber, and a vacuum gauge for detecting the pressure inside the vacuum chamber.Type: GrantFiled: March 20, 2009Date of Patent: February 21, 2012Assignee: JEOL Ltd.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi
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Patent number: 8030622Abstract: A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).Type: GrantFiled: June 4, 2009Date of Patent: October 4, 2011Assignee: JEOL Ltd.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi, Mitsuo Suga
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Patent number: 7906760Abstract: An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.Type: GrantFiled: December 15, 2008Date of Patent: March 15, 2011Assignee: JEOL Ltd.Inventors: Hidetoshi Nishiyama, Mitsuo Suga, Mitsuru Koizumi
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Publication number: 20100243888Abstract: An inspection apparatus and method capable of well observing or inspecting a specimen contained in a liquid. The inspection apparatus has a film including first and second surfaces. Furthermore, the apparatus has a vacuum chamber for reducing the pressure in the ambient in contact with the second surface of the film, primary beam irradiation column connected with the vacuum chamber, and a shutter for partially partitioning the space between the film and the primary beam irradiation column within the vacuum chamber. A liquid sample is held on the first surface of the film. The primary beam irradiation column irradiates the sample. Backscattered electrons (a secondary beam) produced from the sample by the primary beam irradiation are directed at the shutter, producing secondary electrons (a tertiary signal).Type: ApplicationFiled: March 17, 2010Publication date: September 30, 2010Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi, Mitsuo Suga
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Patent number: 7745802Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.Type: GrantFiled: January 31, 2008Date of Patent: June 29, 2010Assignee: Jeol Ltd.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi
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Publication number: 20100051803Abstract: A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.Type: ApplicationFiled: August 24, 2009Publication date: March 4, 2010Applicant: JEOL LTD.Inventors: Mitsuru Koizumi, Hidetoshi Nishiyama
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Publication number: 20100019146Abstract: Specimen holder, specimen inspection apparatus, and specimen inspection method for observing or inspecting a specimen consisting of cultured cells. The specimen holder has a body portion and a film. The body portion has a specimen-holding surface opened to permit access from the outside. The film has a first surface forming the specimen-holding surface. The specimen disposed on the first surface of the film can be irradiated with a primary beam for observation or inspection of the specimen via the film. A region coated with an electrically conductive film is formed on the bottom surface of the body portion facing away from the specimen-holding surface. An optically transparent region not coated with the electrically conductive film is also formed on the bottom surface.Type: ApplicationFiled: July 10, 2009Publication date: January 28, 2010Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi, Mitsuo Suga
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Publication number: 20090314955Abstract: A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).Type: ApplicationFiled: June 4, 2009Publication date: December 24, 2009Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi, Mitsuo Suga
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Patent number: 7632486Abstract: Bone metastasis and the efficacy of drugs in the treatment of malignant tumors such as breast cancer, prostatic cancer and lung cancer that cause the bone metastasis are diagnosed using a marker that reflects the activity of osteoblasts and a marker that reflects the action of osteoclasts.Type: GrantFiled: August 20, 1999Date of Patent: December 15, 2009Inventors: Etsuro Ogata, Mitsuru Koizumi, Shunji Takahashi
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Publication number: 20090250609Abstract: An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.Type: ApplicationFiled: December 15, 2008Publication date: October 8, 2009Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuo Suga, Mitsuru Koizumi
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Publication number: 20090242762Abstract: Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means for detecting a secondary signal produced from the sample in response to the beam irradiation, a partitioning plate for partially partitioning off the space between the film and the primary beam irradiation means in the vacuum chamber, and a vacuum gauge for detecting the pressure inside the vacuum chamber.Type: ApplicationFiled: March 20, 2009Publication date: October 1, 2009Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi
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Publication number: 20080308731Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.Type: ApplicationFiled: January 31, 2008Publication date: December 18, 2008Applicant: JEOL LTD.Inventors: Hidetoshi Nishiyama, Mitsuru Koizumi
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Patent number: 6831278Abstract: An electron beam irradiation system has a pumping block at an end of a microscope column of electron optics. The system has the rotary stage, the microscope column for directing an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.Type: GrantFiled: November 1, 2002Date of Patent: December 14, 2004Assignees: Sony Corporation, JEOL Ltd.Inventors: Masanobu Yamamoto, Hiroshi Kawase, Jun Sasaki, Minoru Takeda, Gakuo Komatsubara, Mitsuru Koizumi, Setsuo Norioka, Naoki Date
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Patent number: 6737660Abstract: An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18.Type: GrantFiled: February 24, 2003Date of Patent: May 18, 2004Assignees: Sony Corporation, Jeol Ltd.Inventors: Yoshihisa Miura, Yuichi Aki, Hiroshi Kawase, Masanobu Yamamoto, Naoki Date, Setsuo Norioka, Mitsuru Koizumi, Gakuo Komatsubara
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Publication number: 20030178581Abstract: An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18.Type: ApplicationFiled: February 24, 2003Publication date: September 25, 2003Inventors: Yoshihisa Miura, Yuichi Aki, Hiroshi Kawase, Masanobu Yamamoto, Naoki Date, Setsuo Norioka, Mitsuru Koizumi, Gakuo Komatsubara
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Publication number: 20030116718Abstract: An electron beam irradiation system has a pumping block at an end of a microscope column of electron optics. The system has the rotary stage, the microscope column for directing an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.Type: ApplicationFiled: November 1, 2002Publication date: June 26, 2003Applicant: SONY CORPORATIONInventors: Masanobu Yamamoto, Hiroshi Kawase, Jun Sasaki, Minoru Takeda, Gakuo Komatsubara, Mitsuru Koizumi, Setsuo Norioka, Naoki Date