Patents by Inventor Mitsutaka Naitoh

Mitsutaka Naitoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150017328
    Abstract: A surface treatment apparatus includes a treatment vessel which contains a treatment solution, a transfer device which transfers a substrate through an interior portion of the treatment vessel in an in-plane direction of the substrate, and a jet device which is positioned in the interior portion of the treatment vessel and jets the treatment solution onto a surface of the substrate such that the surface of the substrate is treated with the treatment solution in the interior portion of the treatment vessel. The jet device has a nozzle hole which jets the treatment solution in a jet direction set parallel or diagonal with respect to the substrate surface.
    Type: Application
    Filed: July 15, 2014
    Publication date: January 15, 2015
    Applicant: IBIDEN CO., LTD.
    Inventors: Takashi Nakane, Yoshihiro Nishio, Yoshiki Kawai, Teruyoshi Hisada, Koya Ozeki, Mitsutaka Naitoh, Yutaka Shichi