Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

Abstract: A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.

Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

Abstract: A power converter includes a power conversion controller configured to determine whether or not an output terminal is misconnected to a system power supply based on a current between a power converter and the output terminal and a voltage between the power converter and the output terminal, and to perform a control to stop power conversion in the power converter when determining that the output terminal is misconnected to the system power supply.

Abstract: A control device for a mobile body is equipped with a charging and electrical power supplying unit including a first smoothing capacitor positioned on a connector side and a second smoothing capacitor positioned on a battery side, and a control unit configured to control the charging and electrical power supplying unit. When the battery is charged using electrical power supplied from the electrical power source device, the control unit completes precharging a first smoothing capacitor and a second smoothing capacitor using electrical power supplied from the battery, before the electrical power from the electrical power source device starts to be supplied to the charging and electrical power supplying unit.

Abstract: An apparatus transfers a substrate. The apparatus includes: one substrate holder adsorbing and holding the substrate via an adsorption port; a nozzle being provided on a surface of the one substrate holder and allowing gas to pass therethrough; an adsorption flow path being connected to the adsorption port and allowing gas to flow therethrough; and a nozzle flow path being connected to the nozzle and allowing the gas to flow therethrough. The adsorption flow path of at least one of the one substrate holder and another substrate holder and the nozzle flow path are connected to a common gas suction mechanism. A pressure sensor and flow rate sensor are provided for the nozzle flow path. The flow rate of the nozzle flow path is varied according to a distance between an interferer and the one substrate holder and the pressure of the nozzle flow path.

Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

Abstract: A control device for a mobile body is equipped with a switching unit configured to switch a conductive path between a charging and electrical power supplying unit, a charging connector, and an electrical power supplying connector, a connection determination unit configured to determine whether or not an electrical load is connected to the electrical power supplying connector, a failure determination unit configured to execute a failure determination to determine a failure of the switching unit based on a conductive state when the conductive path is switched, and a control unit configured to limit execution of the failure determination by the failure determination unit, in the case it is determined by the connection determination unit that the electrical load is connected to the electrical power supplying connector.

Abstract: A control device for a mobile body is equipped with a charging and electrical power supplying unit including a first smoothing capacitor positioned on a connector side and a second smoothing capacitor positioned on a battery side, and a control unit configured to control the charging and electrical power supplying unit. When the battery is charged using electrical power supplied from the electrical power source device, the control unit completes precharging a first smoothing capacitor and a second smoothing capacitor using electrical power supplied from the battery, before the electrical power from the electrical power source device starts to be supplied to the charging and electrical power supplying unit.

Abstract: A power converter includes a power conversion controller configured to determine whether or not an output terminal is misconnected to a system power supply based on a current between a power converter and the output terminal and a voltage between the power converter and the output terminal, and to perform a control to stop power conversion in the power converter when determining that the output terminal is misconnected to the system power supply.

Abstract: A management apparatus that controls transmission and reception of electric power between a secondary battery mounted on a vehicle and accumulating the electric power used for traveling of the vehicle, and an electric power system, and includes an acquirer acquiring a position of the vehicle, a first specific location related to a user of the vehicle, and power storage information regarding the secondary battery, and a manager determining an amount of electric power supplied to the electric power system from the secondary battery only to the extent of a power storage amount obtained by subtracting a power storage amount with which the vehicle can travel from the position of the vehicle acquired by the acquirer to the first specific location from a power storage amount of the secondary battery.

Abstract: An information providing apparatus includes: an acquisition part that acquires cost data derived based on vehicle position data indicating a position of a vehicle and electric power purchase facility position data indicating a position of an electric power purchase facility, the cost data indicating a cost required for the vehicle to move to the electric power purchase facility, and electric power purchase price data indicating an electric power purchase price at the electric power purchase facility; and a providing part that provides information in which the cost indicated by the cost data and the electric power purchase price indicated by the electric power purchase price data are associated with each other.

Abstract: A temperature determination apparatus includes a signal detection section having an A/D input port, a thermistor that is connected to the A/D input port and outputs an analog signal to the A/D input port, and a switch section that shifts a level of the analog signal to a low level. The signal detection section determines that a control signal having a priority higher than that of an output detection process of the thermistor is generated when it is detected that the analog signal to be input to the A/D input port is in the low level.

Abstract: A temperature determination apparatus includes a signal detection section having an A/D input port, a thermistor that is connected to the A/D input port and outputs an analog signal to the A/D input port, and a switch section that shifts a level of the analog signal to a low level. The signal detection section determines that a control signal having a priority higher than that of an output detection process of the thermistor is generated when it is detected that the analog signal to be input to the A/D input port is in the low level.

Abstract: A temperature determination apparatus includes a signal detection section having an A/D input port, a thermistor that is connected to the A/D input port and outputs an analogue signal to the A/D input port, and a switch section that shifts a level of the analogue signal to a low level. The signal detection section determines that a control signal having a priority higher than that of an output detection process of the thermistor is generated when it is detected that the analogue signal to be input to the A/D input port is in the low level.

Abstract: A charging cable for use in charging a vehicle includes a power line, an input section, an oscillator, and a pulse-width adjusting device. The power line is used to carry power from an external power supply to the vehicle. The external power supply and the vehicle are connected to each other with the power line disposed therebetween. A set charging current value in charging the vehicle is input to the input section. The oscillator is configured to generate an oscillation signal having a pulse width within a range of a rated current of the external power supply. The rated current is capable of being supplied to the vehicle. The pulse-width adjusting device is configured to adjust the pulse width of the oscillation signal generated by the oscillator to correspond to the set charging current value input from the input section.

Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Abstract: In the present invention, temperature drop amounts of heating plate regions when the substrate is mounted on a heating plate are detected to detect a warped state of the substrate. From the temperature drop amounts of the heating plate regions, correction values for set temperatures of the heating plate regions are calculated. The calculation of the correction values for the set temperatures of the heating plate regions is performed by estimating steady temperatures within the substrate to be heat-processed on the heating plate from the temperature drop amounts of the heating plate regions using a correlation obtained in advance. From the estimated steady temperatures within the substrate and the temperature drop amounts of the heating regions, the correction values for the set temperatures of the heating plate regions are calculated. Based on the correction values for the set temperatures, the set temperatures of the heating plate regions are changed.

Abstract: The present invention is a transfer apparatus for a substrate, including a substrate housing container housing a substrate therein and having a transfer-in/out port for the substrate formed in a side surface thereof; a gas jet unit jetting a predetermined gas toward a rear surface of the substrate in the substrate housing container; and a control unit regulating a supply amount of the predetermined gas supplied from the gas jet unit to control the substrate in the substrate housing container to a predetermined height.

Abstract: When a malfunction of an ungrounded drive electric system including first and second ungrounded power supplies, an inverter, and a motor which is energized by the first and second ungrounded power supplies through the inverter, i.e., an erroneous opening of switches of a battery, is detected, switches of an insulation resistance detector are opened to insolate the insulation resistance detector from the ungrounded drive electric system.