Abstract: Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

Abstract: Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

Abstract: Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

Abstract: A fluid dynamic bearing includes: a shaft arranged along a center axis; an annular portion expanding radially outwards from the shaft; a sleeve having a top surface opposed to an under surface of the annular portion to support the shaft and the annular portion in a relatively rotatable manner; and a lubricating fluid interposed between the shaft and annular portion and the sleeve. The fluid dynamic bearing further includes a substantially annular edge surrounding the center axis on the under surface and a solid lubricating film on the radially outer side of the edge.

Abstract: According to the preferred embodiment of the present invention, a production method of a fluid dynamic bearing including: a shaft arranged along a center axis; an annular portion expanding radially outwards from the shaft; a sleeve having a top surface opposed to an under surface of the annular portion, for supporting the shaft and the annular portion in a relatively rotatable manner; and a lubricating fluid interposed between the shaft and annular portion and the sleeve, includes the step of preparing the annular portion having a substantially annular edge surrounding the center axis on the under surface; the step of applying a forming liquid for forming a solid lubricating film on the radially outer side of the edge of the under surface; and the step of evaporating a solvent of the forming liquid.