Abstract: The present invention relates to an ink jet head for changing the volume in a pressure chamber by deformation of a laminate piezoelectric device and for jetting ink filled in the pressure chamber from the front openings of the pressure chamber through nozzle holes, and particularly to an ink jet head which is characterized by an adhesive layer interposed between the front end surface of the main body forming the pressure chamber and a nozzle plate. The nozzle plate is bonded to the front end surface of the main body via an adhesive layer formed by an adhesive. The adhesive layer is divided into a nozzle seal layer encompassing the nozzle holes and the periphery of the front openings of the pressure chamber, an outer periphery hermetic layer formed annularly around the outer periphery of a region in which the main body and the nozzle plate oppose each other, and a reinforcing layer distributed in an intermediate portion between the nozzle seal layer and the outer periphery hermetic layer.

Abstract: Laminated piezoelectric elements (2) are formed by alternately laminating first piezoelectric layers (4) and second piezoelectric layers (5), each of which have the shape of a thin plate. First internal electrodes (4a) are formed on a flat surface of each first piezoelectric layer (4) so as to be exposed only on one of the opposite longitudinal end surfaces of the laminated piezoelectric element (2). Second internal electrodes (5a) are formed on a flat surface of each second piezoelectric layer (5) so as to be exposed only on the other longitudinal end surface of the laminated piezoelectric element (2). Since the first and the second internal electrodes (4a, 5a) differ in polarity and are not exposed on the same end surface of each laminated piezoelectric element 2, the first and the second internal electrodes (4a, 5a) are prevented from short-circuiting due to the adhesion of aqueous ink or moisture to the laminated piezoelectric elements (2).

Abstract: A direct-acting table mechanism in which tables are driven without any contact by use of a hydrostatic fluid for thrust-transmitting the tables in their sliding direction. The tables are hydrostatically supported on hydrostatic guides on a bed, and differential pressures are supplied to the hydrostatically supporting portions to control the attitude of the tables. This table mechanism is of high degree of accuracy uninfluenced by errors in the feed screw system, high rigidity and thus permits highly stable fine feed.

Abstract: A finely adjustable table assembly is particularly useful, for example, as a light-exposing device for printing IC (integrated-circuits) patterns and comprises a base plate, a movable table, a plurality of curved plate springs for connecting the movable plate to the base plate, and a non-contact means for driving the movable table. The curved plate springs are arranged perpendicularly to their widths between the movable table and the base plate and, as a sesult, the mass of the movable table is supported by the curved plate springs. As the table driving means, use is made of a non-contact type drive such as an electromagnetic device. The table is capable of being displaced in any direction in a horizontal plane. This displacement can be effected in a highly precise manner because of the absence of mechanical sliding members.