Patents by Inventor Mordechai Rozen

Mordechai Rozen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compensating for an electromagnetic interference induced deviation of an electron beam
    Patent number: 11276545
    Abstract: A method, a non-transitory computer readable medium and a system for compensating for an electromagnetic interference induced deviation of an electron beam. The method may include obtaining measurement information about a magnetic field within an electron beam tool, the measurement information is generated by at least one planar Hall Effect magnetic sensor that is located within the electron beam tool; wherein the at least one planar Hall Effect magnetic sensor comprises at least one magnetometer integrated with at least one magnetic flux concentrator; estimating the electromagnetic interference induced deviation of the electron beam, the estimating is based on the magnetic field; and setting a trajectory of the electron beam to compensate for the electromagnetic interference induced deviation of the electron beam.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: March 15, 2022
    Assignees: APPLIED MATERIALS ISRAEL LTD., BAR ILAN UNIVERSITY, B.G. NeaevTechnoloaies and Apolications Ltd.
    Inventors: Yosef Basson, Yuri Belenky, Mordechai Rozen, Lior Klein, Asaf Grosz
  • System and method for controlling specimen outgassing
    Patent number: 9583307
    Abstract: According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.
    Type: Grant
    Filed: July 1, 2015
    Date of Patent: February 28, 2017
    Assignee: Applied Materials Israel Ltd.
    Inventors: Emil Weisz, Mordechai Rozen
  • SYSTEM AND METHOD FOR CONTROLLING SPECIMEN OUTGASSING
    Publication number: 20170004951
    Abstract: According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.
    Type: Application
    Filed: July 1, 2015
    Publication date: January 5, 2017
    Inventors: Emil Weisz, Mordechai Rozen