Patents by Inventor Motohiro Suyama

Motohiro Suyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11029375
    Abstract: A cell module used for a photoexcitation magnetic sensor includes a cell in which an alkali metal is enclosed, a heater which is disposed close to the cell to heat the alkali metal, and a case which forms a decompression region accommodating the cell and the heater.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: June 8, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Norihisa Kato, Motohiro Suyama
  • Patent number: 10996348
    Abstract: A gamma ray detector is a detector detecting gamma rays and includes a photomultiplier tube having an entrance window and a photoelectric surface. The entrance window is a Cherenkov radiator. The photoelectric surface is formed on a vacuum side of the entrance window via an intermediate layer. The thickness of the intermediate layer is equal to or less than the wavelength of Cherenkov light emitted by an interaction of the gamma rays with the entrance window.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: May 4, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Ryosuke Ota, Motohiro Suyama, Hideki Shimoi
  • Patent number: 10925557
    Abstract: A high-energy ray detector includes a detection unit in a vacuum container. The detection unit includes a first electron multiplier, a second electron multiplier, and an electron collector. Each of the first electron multiplier and the second electron multiplier has one or more MCPs each configured to emit electrons by interaction with an incident high-energy ray (?-ray, X-ray (in particular hard X-ray), or neutron ray), and multiply and output the electrons. The electron collector is transmissive for the high-energy ray. The electron collector is configured to collect the electrons multiplied and output from each of the first electron multiplier and the second electron multiplier, and output an electric pulse signal.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: February 23, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro Suyama, Hideki Shimoi, Ryosuke Ota, Ryoko Yamada
  • Publication number: 20200258794
    Abstract: There is provided a semiconductor manufacturing method capable of coping with an increase in the density of an integrated circuit. A semiconductor manufacturing method according to one aspect of the present invention includes: a step of forming a memory cell, a photodiode that outputs an electrical signal corresponding to an input optical signal, and a signal processing circuit that generates a logic signal based on the electrical signal output from the photodiode and outputs the logic signal to the memory cell, so as to correspond to each chip forming region of a wafer having a plurality of chip forming regions; a step of inputting pump light for checking an operation of the memory cell to the photodiode and inspecting an operation state of the memory cell after the forming step; and a step of performing dicing for each of the chip forming regions after the inspection step.
    Type: Application
    Filed: June 13, 2018
    Publication date: August 13, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomonori NAKAMURA, Motohiro SUYAMA, Hironori TAKAHASHI
  • Publication number: 20200174074
    Abstract: There is provided a semiconductor wafer suitable for the inspection of an operation state. A wafer is a semiconductor wafer having a plurality of chip forming regions, and includes a memory cell that is formed in each of the chip forming regions and an inspection device that is formed in each of the chip forming regions. The inspection device has a photodiode that receives an input of pump light for checking an operation of the memory cell and outputs an electrical signal corresponding to the pump light and a signal processing circuit that generates a logic signal based on the electrical signal output from the photodiode and outputs the logic signal to the memory cell.
    Type: Application
    Filed: June 13, 2018
    Publication date: June 4, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Hironori TAKAHASHI, Tomonori NAKAMURA
  • Publication number: 20200176339
    Abstract: There is provided a semiconductor wafer suitable for the inspection of an operation state. A wafer is a semiconductor wafer having a plurality of chip forming regions, and includes a memory cell that is formed in each of the chip forming regions and an inspection device that is formed outside each of the chip forming regions. The inspection device has a photodiode that receives an input of pump light for checking an operation of the memory cell and outputs an electrical signal corresponding to the pump light and a signal processing circuit that generates a logic signal based on the electrical signal output from the photodiode and outputs the logic signal to the memory cell.
    Type: Application
    Filed: June 13, 2018
    Publication date: June 4, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Hironori TAKAHASHI, Tomonori NAKAMURA
  • Patent number: 10651027
    Abstract: A light-emitting device includes: a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction; a first electrode provided on the first surface; a second electrode provided on the second surface; a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove; a third electrode provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and a fourth electrode provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: May 12, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takaaki Nagata, Takeo Fujii, Motohiro Suyama
  • Publication number: 20200110141
    Abstract: A cell module used for a photoexcitation magnetic sensor includes a cell in which an alkali metal is enclosed, a heater which is disposed close to the cell to heat the alkali metal, and a case which forms a decompression region accommodating the cell and the heater.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 9, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Norihisa KATO, Motohiro SUYAMA
  • Publication number: 20200093448
    Abstract: A high-energy ray detector includes a detection unit in a vacuum container. The detection unit includes a first electron multiplier, a second electron multiplier, and an electron collector. Each of the first electron multiplier and the second electron multiplier has one or more MCPs each configured to emit electrons by interaction with an incident high-energy ray (?-ray, X-ray (in particular hard X-ray), or neutron ray), and multiply and output the electrons. The electron collector is transmissive for the high-energy ray. The electron collector is configured to collect the electrons multiplied and output from each of the first electron multiplier and the second electron multiplier, and output an electric pulse signal.
    Type: Application
    Filed: August 19, 2019
    Publication date: March 26, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Hideki SHIMOI, Ryosuke OTA, Ryoko YAMADA
  • Patent number: 10580952
    Abstract: A light-emitting device according to one embodiment includes: a substrate; a graphite thin film disposed on the substrate; and an electrode provided on a second surface of the graphite thin film on an edge portion of the graphite thin film, the second surface of the graphite thin film being opposite from a first surface of the graphite thin film, the first surface of the graphite thin film opposed to the substrate. A plurality of protrusions for supporting the graphite thin film is formed on a surface of the substrate opposed to the graphite thin film, at least over an entire region where the substrate and a portion of the graphite thin film other than the edge portion overlap each other when viewed along a thickness direction of the substrate.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: March 3, 2020
    Assignees: KEIO UNIVERSITY, HAMAMATSU PHOTONICS K.K.
    Inventors: Hideyuki Maki, Motohiro Suyama, Takaaki Nagata, Takeo Fujii
  • Publication number: 20200064421
    Abstract: A cell for a optically pumped magnetic sensor measures magnetic field by setting alkali metal atoms to a predetermined excitation state by a pump beam and detecting the excitation state by a probe beam. The cell is provided with a glass substrate which seals the alkali metal atoms and an enclosing gas and transmits the pump beam and the probe beam and a coating layer provided on an inner surface of the glass substrate. The coating layer is made of an inorganic material.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 27, 2020
    Applicants: HAMAMATSU PHOTONICS K.K., Kyoto University
    Inventors: Tetsuo KOBAYASHI, Norihisa KATO, Motohiro SUYAMA
  • Publication number: 20200020519
    Abstract: A light-emitting device includes: a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction; a first electrode provided on the first surface; a second electrode provided on the second surface; a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove; a third electrode provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and a fourth electrode provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.
    Type: Application
    Filed: July 10, 2019
    Publication date: January 16, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takaaki NAGATA, Takeo FUJII, Motohiro SUYAMA
  • Publication number: 20190331617
    Abstract: A gamma ray detector is a detector detecting gamma rays and includes a photomultiplier tube having an entrance window and a photoelectric surface. The entrance window is a Cherenkov radiator. The photoelectric surface is formed on a vacuum side of the entrance window via an intermediate layer. The thickness of the intermediate layer is equal to or less than the wavelength of Cherenkov light emitted by an interaction of the gamma rays with the entrance window.
    Type: Application
    Filed: April 25, 2019
    Publication date: October 31, 2019
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Ryosuke OTA, Motohiro SUYAMA, Hideki SHIMOI
  • Patent number: 10312068
    Abstract: A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle ? and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: June 4, 2019
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro Suyama, Hiroshi Kobayashi, Shinya Hattori
  • Publication number: 20190123254
    Abstract: A light-emitting device according to one embodiment includes: a substrate; a graphite thin film disposed on the substrate; and an electrode provided on a second surface of the graphite thin film on an edge portion of the graphite thin film, the second surface of the graphite thin film being opposite from a first surface of the graphite thin film, the first surface of the graphite thin film opposed to the substrate. A plurality of protrusions for supporting the graphite thin film is formed on a surface of the substrate opposed to the graphite thin film, at least over an entire region where the substrate and a portion of the graphite thin film other than the edge portion overlap each other when viewed along a thickness direction of the substrate.
    Type: Application
    Filed: October 17, 2018
    Publication date: April 25, 2019
    Applicants: KEIO UNIVERSITY, HAMAMATSU PHOTONICS K.K.
    Inventors: Hideyuki MAKI, Motohiro SUYAMA, Takaaki NAGATA, Takeo FUJII
  • Publication number: 20190088441
    Abstract: An electron emission tube includes a housing in which an internal space is provided and which keeps the internal space in vacuum, an electron source that is arranged on a first end side in one direction of the housing and that generates an electron, a gate valve that is arranged on a second end side in the one direction of the housing and that can switch the second end side between an open state and a blocked state, and a partition part that is placed between the electron source and the gate valve and that divides the internal space into a first region including the electron source and a second region including the gate valve. The partition part includes an electron-permeable membrane that transmits an electron.
    Type: Application
    Filed: September 14, 2018
    Publication date: March 21, 2019
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Takaaki NAGATA
  • Patent number: 10037871
    Abstract: A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: July 31, 2018
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro Suyama, Hiroshi Kobayashi, Shinya Hattori
  • Publication number: 20180174810
    Abstract: A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle ? and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.
    Type: Application
    Filed: June 30, 2016
    Publication date: June 21, 2018
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Hiroshi KOBAYASHI, Shinya HATTORI
  • Publication number: 20180144914
    Abstract: A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
    Type: Application
    Filed: December 29, 2017
    Publication date: May 24, 2018
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Motohiro SUYAMA, Hiroshi KOBAYASHI, Shinya HATTORI
  • Patent number: 9953816
    Abstract: An ion detector for a Time of Flight mass spectrometer is disclosed comprising a single Microchannel Plate which is arranged to receive ions and output electrons. The electrons are directed onto an array of photodiodes which directly detects the electrons. The output from each photodiode is connected to a separate Time to Digital Converter provided on an ASIC.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: April 24, 2018
    Assignee: MICROMASS UK LIMITED
    Inventors: John Brian Hoyes, Anthony James Gilbert, Motohiro Suyama