Patents by Inventor Motoki Miyasaka

Motoki Miyasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer apparatus and method for controlling down flow
    Patent number: 8092137
    Abstract: The present invention relates to an apparatus for transferring a substrate through a gate for loading and unloading is provided, and includes a transfer chamber having the gate for loading and unloading the substrate, a transfer system, which is able to move up and down in the transfer chamber and transfers the substrate by accessing each gate, an adjustment section for a gas down flow, which produces the gas down flow in the transfer chamber and is able to adjust a speed of the gas down flow, and a control section for controlling the speed of the gas down flow using the movement speed of the substrate.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: January 10, 2012
    Assignee: Tokyo Electron Ltd.
    Inventor: Motoki Miyasaka
  • Substrate transfer apparatus and method for controlling down flow
    Publication number: 20090081005
    Abstract: The present invention relates to an apparatus for transferring a substrate through a gate for loading and unloading is provided, and includes a transfer chamber having the gate for loading and unloading the substrate, a transfer system, which is able to move up and down in the transfer chamber and transfers the substrate by accessing each gate, an adjustment section for a gas down flow, which produces the gas down flow in the transfer chamber and is able to adjust a speed of the gas down flow, and a control section for controlling the speed of the gas down flow using the movement speed of the substrate.
    Type: Application
    Filed: September 24, 2008
    Publication date: March 26, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Motoki Miyasaka