Abstract: A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).

Abstract: A laser device includes: a plurality of optical shutters (61, 62); a power source device (303n) configured to generate high voltage to be applied to the optical shutters (61, 62); a high-voltage side wire (63h) connecting the power source device (303n) and each of the optical shutters (61, 62); a ground-side wire (63g) grounding each of the optical shutters (61, 62); and a high-voltage side shared wire (64h) and a ground-side shared wire (64g) connecting the optical shutters (61, 62) in parallel. One of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (61) disposed on the most upstream side in the traveling direction of the laser beam, and the other of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (62) disposed on the most downstream side in the traveling direction of the laser beam.

Abstract: A laser device includes: a plurality of optical shutters (61, 62); a power source device (303n) configured to generate high voltage to be applied to the optical shutters (61, 62); a high-voltage side wire (63h) connecting the power source device (303n) and each of the optical shutters (61, 62); a ground-side wire (63g) grounding each of the optical shutters (61, 62); and a high-voltage side shared wire (64h) and a ground-side shared wire (64g) connecting the optical shutters (61, 62) in parallel. One of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (61) disposed on the most upstream side in the traveling direction of the laser beam, and the other of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (62) disposed on the most downstream side in the traveling direction of the laser beam.

Abstract: A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).

Abstract: A laser system capable of appropriately controlling the energy of a laser beam pulse is provided. An exemplary laser system of the present disclosure may control an optical isolator to switch from a closed state to an open state and then to return to the closed state for each of the laser beam pulses repeatedly outputted from a master oscillator. The laser system may control the optical attenuator to set an optical transmittance of the optical attenuator for each of the laser beam pulses repeatedly outputted from the master oscillator.

Abstract: A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier disposed in a beam path of the laser beam from the master oscillator, at least one power source for applying a high-frequency voltage to the at least one amplifier, and a controller for varying the high-frequency voltage to be applied to the at least one amplifier from the at least one power source.

Abstract: A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier disposed in a beam path of the laser beam from the master oscillator, at least one power source for applying a high-frequency voltage to the at least one amplifier, and a controller for varying the high-frequency voltage to be applied to the at least one amplifier from the at least one power source.

Abstract: The pulsed laser control system comprises a plurality of controllers (2) through (6) for controlling devices (21) through (30) constituting the pulsed laser apparatus (1); parallel communication lines (P1) to (P4) for parallel connection of the plurality of controllers (2) through (6); an Ethernet (S) for serial connection of the plurality of controllers (2) through (6); parallel communication line (PP) for parallel connection between the external apparatus (10) and the main controller (2); and an Ethernet (SS) for serial connection between the external apparatus (10) and the main controller (2); wherein the parallel communication lines (P1) to (P4) and (PP) transmit signals for which realtime performance is required. With this construction, even if design changes are frequently made to a pulsed laser apparatus, the changes can be made easily and with little expansion space. Moreover, management of the devices constituting the pulsed laser apparatus can be easily performed.