Abstract: It is an object of the present invention to provide a measuring apparatus capable of easily restoring the tracking state when the tracking state of the target is interrupted. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus includes: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; an imaging unit for capturing the target or the vicinity of the target, and a recognition unit for recognizing the target or the specific portion including the target from an image captured by the imaging unit.

Abstract: It is an object of the present invention to provide a measuring apparatus capable of easily grasping a tracking state of a target and performing an efficient measurement. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus comprises: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; a display unit that provided on a device that is wearable by a measurer; a calculation unit for calculating the three-dimensional coordinates of the target based on the emission angle of the light beam and the light returning from the target; and a display control unit that controls information displayed on the display unit based on the three-dimensional coordinates calculated by the calculation unit.

Abstract: It is an object of the present invention to provide a measuring apparatus capable of easily grasping a tracking state of a target and performing an efficient measurement. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus comprises: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; a display unit that provided on a device that is wearable by a measurer; a calculation unit for calculating the three-dimensional coordinates of the target based on the emission angle of the light beam and the light returning from the target; and a display control unit that controls information displayed on the display unit based on the three-dimensional coordinates calculated by the calculation unit.

Abstract: It is an object of the present invention to provide a measuring apparatus capable of easily restoring the tracking state when the tracking state of the target is interrupted. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus includes: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; an imaging unit for capturing the target or the vicinity of the target, and a recognition unit for recognizing the target or the specific portion including the target from an image captured by the imaging unit.

Abstract: An exposure method for projecting a pattern on an exposure mask onto a work by an exposure control of an exposure light including calculating an exposure position on the work from a relative positional relationship of the exposure mask and the work, setting a range acceptable for projecting the pattern even when the exposure position is off a target exposure position on the work as an exposure position range, and (3) executing an exposure control that irradiates the exposure light to the exposure mask when the exposure position is in the exposure position range, and that stops the exposure light when the exposure position is out of the exposure position range.

Abstract: An exposure method for projecting a pattern on an exposure mask onto a work by an exposure control of an exposure light including calculating an exposure position on the work from a relative positional relationship of the exposure mask and the work, setting a range acceptable for projecting the pattern even when the exposure position is off a target exposure position on the work as an exposure position range, and (3) executing an exposure control that irradiates the exposure light to the exposure mask when the exposure position is in the exposure position range, and that stops the exposure light when the exposure position is out of the exposure position range.

Abstract: A coordinate measuring machine includes a probe having a measurement unit, a movement mechanism for moving the probe and a host computer for controlling the movement mechanism. The host computer includes: a compensation-amount calculating unit for calculating a compensation amount for compensating an error in the position of the measurement unit caused by the movement of the probe; and a compensator for compensating the error in the position of the measurement unit based on the compensation amount calculated by the compensation-amount calculating unit. The compensation-amount calculating unit calculates a translation-compensation amount for compensating a translation error of the probe and a rotation-compensation amount for compensating a rotation error of the probe based on a rotation frequency of the movement of the probe.

Abstract: A form measuring instrument includes an instrument body and a controller that controls the instrument body. The instrument body includes a probe. The probe includes: a rod-like stylus having a distal end attached with a stylus tip for contacting with an object; and a support mechanism that supports the base end of the stylus. The support mechanism includes a probe sensor that detects the position of the stylus and supports the stylus in a manner movable within a predetermined range. The controller calculates a measurement value based on a transfer function whose input is the position of the stylus detected by the probe sensor and output is the contact position of the stylus tip against the object.

Abstract: A coordinate measuring machine includes a probe having a measurement unit, a movement mechanism for moving the probe and a host computer for controlling the movement mechanism. The host computer includes: a compensation-amount calculating unit for calculating a compensation amount for compensating an error in the position of the measurement unit caused by the movement of the probe; and a compensator for compensating the error in the position of the measurement unit based on the compensation amount calculated by the compensation-amount calculating unit. The compensation-amount calculating unit calculates a translation-compensation amount for compensating a translation error of the probe and a rotation-compensation amount for compensating a rotation error of the probe based on a rotation frequency of the movement of the probe.

Abstract: A form measuring instrument includes an instrument body and a controller that controls the instrument body. The instrument body includes a probe. The probe includes: a rod-like stylus having a distal end attached with a stylus tip for contacting with an object; and a support mechanism that supports the base end of the stylus. The support mechanism includes a probe sensor that detects the position of the stylus and supports the stylus in a manner movable within a predetermined range. The controller calculates a measurement value based on a transfer function whose input is the position of the stylus detected by the probe sensor and output is the contact position of the stylus tip against the object.

Abstract: In a measuring method with a probe (a touch trigger probe 70), a velocity V1 and a coordinate value P1 of the prove trigger probe 70 are detected when a contact-detection signal is generated from the probe 70, and then a coordinate value P0 at the moment of contact is found from the coordinate value P1, the velocity V1, and an elapsed time T1 of the touch trigger prove 70 since the contact detection (an elapsed time from the contact until the contact-detection signal is generated).

Abstract: The phase controlling circuit 1 controls the phase of the input sinusoidal signal S1 to generate first and second sinusoidal signal S1 and S2 which have different phases of 90.degree. shifted from each other. The signal generating circuits 2a and 2b square the first and second sinusoidal signal S1 and S2 to generate first and second squared sinusoidal signals S1.sup.2 and S2.sup.2, respectively. The squared sinusoidal signals S1.sup.2 and S2.sup.2 are added by the signal adding circuit 3, thereby generating the added output S3 which is an amplitude of the input sinusoidal signal S. The phase controlling circuit 1 comprises 90.degree. phase shift circuits 11 and 12 which have a common signal input terminal and the respective signal output terminals. The 90.degree. phase shift circuit is composed of an all-pass filter whose central frequency is set to be f0-.DELTA. f so as to generate the first sinusoidal signal. The second 90.degree.