Abstract: A microwave sintering furnace and a microwave sintering method are disclosed, in which the object to be sintered develops no cracking or deformation in the degreasing process. A microwave sintering furnace (1) comprises a furnace body (2) containing an object (S) to be sintered, a unit (3, 4) for generating and introducing microwaves into the furnace body, a unit (8) for supplying a degreasing gas into the furnace body (2), and a unit (11) for heating the degreasing gas before it reaches the object (S) to be sintered.

Abstract: A cryopump is provided with a detecting means for detecting an operation parameter at an elapsed operation time in a current operation cycle of the cryopump, a storing means for storing a value of another operation parameter in a past operation cycle of the cryopump as a management parameter, an arithmetic controlling means for calculating a succeeding rotational speed of the expander motor based on the current operational parameter and the management parameter stored in the storing means and outputting the same as a driving instruction signal, with which the succeeding rotational speed of the expander motor is controlled so as to maintain a temperature of a cryopanel or a pressure in a vacuum chamber to which the cryopump is attached at a predetermined value by using the operation parameter at the elapsed operation time in the current operation cycle of the cryopump detected by the detecting means and the operation parameter at the corresponding elapsed operation time in the past operation cycle of the cryop