Patents by Inventor Muljadi Tantra

Muljadi Tantra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process monitoring system for lithography lasers
    Patent number: 7203562
    Abstract: A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: April 10, 2007
    Assignee: Cymer, Inc.
    Inventors: Parthiv S. Patel, Joseph E. Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi, Roger L. Green, Tom A. Watson, Christopher G. Rowan
  • Process monitoring system for lithography lasers
    Publication number: 20040186609
    Abstract: A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
    Type: Application
    Filed: January 28, 2004
    Publication date: September 23, 2004
    Inventors: Parthiv S. Patel, Joseph E. Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi, Roger L. Green, Tom A. Watson, Christopher G. Rowan
  • Process monitoring system for lithography lasers
    Patent number: 6687562
    Abstract: A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
    Type: Grant
    Filed: December 8, 2000
    Date of Patent: February 3, 2004
    Assignee: Cymer, Inc.
    Inventors: Parthiv S. Patel, Joseph E. Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi, Roger L. Green, Tom A. Watson, Christopher G. Rowan
  • Process monitoring system for lithography lasers
    Publication number: 20010020195
    Abstract: A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
    Type: Application
    Filed: December 8, 2000
    Publication date: September 6, 2001
    Inventors: Parthiv S. Patel, Joseph E. Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi, Roger L. Green, Tom A. Watson, Christopher G. Rowan
  • Automatic fluorine control system
    Patent number: 6028880
    Abstract: An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.
    Type: Grant
    Filed: July 2, 1998
    Date of Patent: February 22, 2000
    Assignee: Cymer, Inc.
    Inventors: Jason R. Carlesi, Shahryar Rokni, Mengxiong Gong, Tom A. Watson, Palash P. Das, Michael C. Binder, Muljadi Tantra, David J. Tammadge, Daniel G. Patterson