Abstract: A method for manufacturing an electronic component includes preparing an element substrate having a function section for providing a function of an electronic component, and an external-connection electrode; bonding a low-sandblast-resistant case plate to the element substrate through a high-sandblast-resistant adhesive layer; forming, by sandblast processing, a hole in the case plate above the external-connection electrode so that the adhesive layer is exposed to the outside; removing, by etching, an adhesive layer portion that is exposed in the hole; forming an electrode film so as to be electrically connected to the exposed external-connection electrode; and forming, by mechanical machining, a projection having a leading end surface on which a terminal electrode resulting from the electrode film is defined.

Abstract: A method for manufacturing an electronic component includes preparing an element substrate having a function section for providing a function of an electronic component, and an external-connection electrode; bonding a low-sandblast-resistant case plate to the element substrate through a high-sandblast-resistant adhesive layer; forming, by sandblast processing, a hole in the case plate above the external-connection electrode so that the adhesive layer is exposed to the outside; removing, by etching, an adhesive layer portion that is exposed in the hole; forming an electrode film so as to be electrically connected to the exposed external-connection electrode; and forming, by mechanical machining, a projection having a leading end surface on which a terminal electrode resulting from the electrode film is defined.

Abstract: A mechanical quantity sensor includes a current-to-voltage converter/signal adder circuit that converts electric current signals flowing through two piezoelectric vibrators into voltage signals. The piezoelectric vibrators receive stresses generated by a mechanical quantity, such as acceleration, in opposite directions. A voltage amplifier/amplitude limiter circuit amplifies an added signal obtained from the two voltage signals and limits its amplitude. A phase-difference-to-voltage converter circuit detects a difference in the phases of the added signal and a feedback voltage signal applied to an acceleration detection element. A phase shifter circuit controls the phase of the feedback voltage signal so that the phase is a predetermined phase. A filter circuit minimizes frequency components higher than an oscillation frequency in an unwanted frequency band. By increasing the resistance of resistors so as to increase the damping ratio, temperature stability is increased.

Abstract: A piezoelectric-vibrator series circuit including two series-connected piezoelectric vibrators to which stresses induced by a dynamic quantity are applied in opposite directions is used, and a Colpitts oscillator circuit is defined by the piezoelectric-vibrator series circuit and an amplifier circuit/load impedance circuit. A phase-difference-to-voltage converter circuit is provided to convert a phase difference between an output voltage of the oscillator circuit and a voltage at a piezoelectric-vibrator series node of the piezoelectric-vibrator series circuit into a voltage signal.

Abstract: A mechanical quantity sensor includes a current-to-voltage converter/signal adder circuit that converts electric current signals flowing through two piezoelectric vibrators into voltage signals. The piezoelectric vibrators receive stresses generated by a mechanical quantity, such as acceleration, in opposite directions. A voltage amplifier/amplitude limiter circuit amplifies an added signal obtained from the two voltage signals and limits its amplitude. A phase-difference-to-voltage converter circuit detects a difference in the phases of the added signal and a feedback voltage signal applied to an acceleration detection element. A phase shifter circuit controls the phase of the feedback voltage signal so that the phase is a predetermined phase. A filter circuit minimizes frequency components higher than an oscillation frequency in an unwanted frequency band. By increasing the resistance of resistors so as to increase the damping ratio, temperature stability is increased.

Abstract: A piezoelectric-vibrator series circuit including two series-connected piezoelectric vibrators to which stresses induced by a dynamic quantity are applied in opposite directions is used, and a Colpitts oscillator circuit is defined by the piezoelectric-vibrator series circuit and an amplifier circuit/load impedance circuit. A phase-difference-to-voltage converter circuit is provided to convert a phase difference between an output voltage of the oscillator circuit and a voltage at a piezoelectric-vibrator series node of the piezoelectric-vibrator series circuit into a voltage signal.

Abstract: A dynamic-quantity sensor includes two piezoelectric vibrators which are arranged such that stresses generated by a dynamic quantity, such as acceleration, are applied in opposite phases to the piezoelectric vibrators. A current-voltage converting and signal adding circuit converts current signals flowing in the piezoelectric vibrators into voltage signals. A feedback signal processing circuit amplifies a combined signal of the two voltage signals and feeds back the combined signal to an acceleration sensing element, so that oscillation is performed. A self-diagnostic circuit including a series circuit including a switching circuit and a capacitor is provided between a reference potential (ground) and a node between one of the piezoelectric vibrators and a resistor in which a current of the one of the piezoelectric vibrators flows. Diagnosis is performed in accordance with whether or not a signal based on turning on and off of the switching circuit changes normally.

Abstract: A dynamic-quantity sensor includes two piezoelectric vibrators which are arranged such that stresses generated by a dynamic quantity, such as acceleration, are applied in opposite phases to the piezoelectric vibrators. A current-voltage converting and signal adding circuit converts current signals flowing in the piezoelectric vibrators into voltage signals. A feedback signal processing circuit amplifies a combined signal of the two voltage signals and feeds back the combined signal to an acceleration sensing element, so that oscillation is performed. A self-diagnostic circuit including a series circuit including a switching circuit and a capacitor is provided between a reference potential (ground) and a node between one of the piezoelectric vibrators and a resistor in which a current of the one of the piezoelectric vibrators flows. Diagnosis is performed in accordance with whether or not a signal based on turning on and off of the switching circuit changes normally.

Abstract: A mechanical-force sensor includes two piezoelectric vibrators which are arranged such that stresses in mutually opposite directions are applied thereto by a mechanical force such as an acceleration. A current-voltage converter and signal-summing circuit converts current signals that flow through the two piezoelectric vibrators into voltage signals. A voltage-amplifier and amplitude limiter circuit amplifies a sum signal of the two voltage signals, and provides a positive feedback of a voltage signal that is in phase with the current signals, thereby causing an oscillating operation. A phase difference-voltage converter circuit generates a voltage signal that is proportional to the phase difference between the voltage signals yielded by the conversion. An amplifier and filter circuit DC-amplifies the voltage signal and removes unwanted frequency components therefrom.

Abstract: An amplification circuit for electric charge type sensor has a simple circuit configuration in which a common mode noise is adequately cancelled. In the acceleration sensor amplification circuit, the inversion input terminal of an operational amplifier is connected to one end of the acceleration sensor (G sensor). In addition, a feedback circuit including a feedback resistor and a feedback capacitor connected in parallel to each other is connected between the inversion input terminal and the output terminal of the operational amplifier. Furthermore, a cancellation circuit including a cancel resistor and a cancel capacitor connected in parallel to each other is connected between the non-inversion input terminal of the operational amplifier and a reference voltage.

Abstract: A mechanical-force sensor includes two piezoelectric vibrators which are arranged such that stresses in mutually opposite directions are applied thereto by a mechanical force such as an acceleration. A current-voltage converter and signal-summing circuit converts current signals that flow through the two piezoelectric vibrators into voltage signals. A voltage-amplifier and amplitude limiter circuit amplifies a sum signal of the two voltage signals, and provides a positive feedback of a voltage signal that is in phase with the current signals, thereby causing an oscillating operation. A phase difference-voltage converter circuit generates a voltage signal that is proportional to the phase difference between the voltage signals yielded by the conversion. An amplifier and filter circuit DC-amplifies the voltage signal and removes unwanted frequency components therefrom.

Abstract: An acceleration sensor includes a bridge circuit including two capacitors and two piezoelectric vibrators on which reverse stresses are exerted by acceleration, and a voltage-dividing impedance circuit provided between a second junction point and a third junction point. The signal of a voltage-dividing point of the voltage-dividing impedance circuit is fed back to a first junction point, so that an oscillation circuit is provided. An oscillating-output phase difference between the second and third junction points is detected by a phase-difference-signal processing circuit and is output as an acceleration-detection signal.

Abstract: An acceleration sensor includes a bridge circuit including two capacitors and two piezoelectric vibrators on which reverse stresses are exerted by acceleration, and a voltage-dividing impedance circuit provided between a second junction point and a third junction point. The signal of a voltage-dividing point of the voltage-dividing impedance circuit is fed back to a first junction point, so that an oscillation circuit is provided. An oscillating-output phase difference between the second and third junction points is detected by a phase-difference-signal processing circuit and is output as an acceleration-detection signal.

Abstract: An amplification circuit for electric charge type sensor has a simple circuit configuration in which a common mode noise is adequately cancelled. In the acceleration sensor amplification circuit, the inversion input terminal of an operational amplifier is connected to one end of the acceleration sensor (G sensor). In addition, a feedback circuit including a feedback resistor and a feedback capacitor connected in parallel to each other is connected between the inversion input terminal and the output terminal of the operational amplifier. Furthermore, a cancellation circuit including a cancel resistor and a cancel capacitor connected in parallel to each other is connected between the non-inversion input terminal of the operational amplifier and a reference voltage.

Abstract: A charge-type sensor amplifying circuit includes an operational amplifier having an inverting input terminal thereof connected to one terminal of a charge-type sensor, a voltage divider having two voltage-dividing points which divide the output voltage from the operational amplifier, a feedback resistor connected between the inverting input terminal of the operational amplifier and one voltage-dividing point of the voltage divider which is on the output terminal side of the operational amplifier, and a feedback capacitor connected in parallel with the feedback resistor. In the charge-type sensor amplifying circuit, the other terminal of the charge-type sensor is connected to the other voltage-dividing point of the voltage divider which is not on the output terminal side of the operational amplifier.

Abstract: An amplification circuit for electric charge type sensor has a simple circuit configuration in which a common mode noise is adequately cancelled. In the acceleration sensor amplification circuit, the inversion input terminal of an operational amplifier is connected to one end of the acceleration sensor (G sensor). In addition, a feedback circuit including a feedback resistor and a feedback capacitor connected in parallel to each other is connected between the inversion input terminal and the output terminal of the operational amplifier. Furthermore, a cancellation circuit including a cancel resistor and a cancel capacitor connected in parallel to each other is connected between the non-inversion input terminal of the operational amplifier and a reference voltage.

Abstract: A high-precision acceleration sensor capable of performing sensitivity adjustment by the sensor alone includes an acceleration sensing device disposed in an insulated case, in which external lead electrodes connected to the acceleration sensing device, a trimmable resistor, and external lead electrodes connected to both ends of the trimmable resistor, are formed on a surface of the insulating case. The trimmable resistor is a film-formed resistor made by printing. The sensitivity of the acceleration sensor can be adjusted by laser-trimming of the trimmable resistor.

Abstract: An amplification circuit for electric charge type sensor has a simple circuit configuration in which a common mode noise is adequately cancelled. In the acceleration sensor amplification circuit, the inversion input terminal of an operational amplifier is connected to one end of the acceleration sensor (G sensor). In addition, a feedback circuit including a feedback resistor and a feedback capacitor connected in parallel to each other is connected between the inversion input terminal and the output terminal of the operational amplifier. Furthermore, a cancellation circuit including a cancel resistor and a cancel capacitor connected in parallel to each other is connected between the non-inversion input terminal of the operational amplifier and a reference voltage.

Abstract: A charge-type sensor amplifying circuit includes an operational amplifier having an inverting input terminal thereof connected to one terminal of a charge-type sensor, a voltage divider having two voltage-dividing points which divide the output voltage from the operational amplifier, a feedback resistor connected between the inverting input terminal of the operational amplifier and one voltage-dividing point of the voltage divider which is on the output terminal side of the operational amplifier, and a feedback capacitor connected in parallel with the feedback resistor. In the charge-type sensor amplifying circuit, the other terminal of the charge-type sensor is connected to the other voltage-dividing point of the voltage divider which is not on the output terminal side of the operational amplifier.

Abstract: An amplifier having an operational amplifier, and in which an output terminal of an acceleration sensor is connected to the non-inverting input terminal of the operational amplifier, a leakage resistor R1 is connected between a non-inverting input terminal and the reference voltage, a first capacitor C1 and a first resistor R2 are connected in series with each other between the inverting input terminal and the reference voltage, first and second voltage dividing resistors are connected in series with each other between the output terminal of the operational amplifier and the reference voltage, and a second resistor R3 and a second capacitor C2 are connected in parallel with each other between the connection point of the voltage dividing resistors and the inverting input terminal, and the relationship C1×R2<C2×R3 is satisfied.