Abstract: A sensory control method includes a step of receiving, a step of converting, and a step of outputting. In the step of receiving, a sensitivity parameter is received. In the step of converting, the received sensitivity parameter is converted into, among a plurality of physical parameters included in physical properties relating to a sensory presentation, a physical parameter correlated with the sensitivity parameter. In the step of outputting, a sensory presentation signal based on the physical parameter obtained as a result of the conversion is output.

Abstract: In a magnetic core including a laminated core in which multiple core thin strips are laminated, the magnetic core includes a cutting mark region formed by cutting tie sticks 212, connected to the core thin strips 511, in a lamination direction of the core thin strips 511, and the cutting mark region 51C is positioned on an inner side than outer peripheries of the core thin strips 511. The core thin strip 511 may include a portion made of a nanocrystal-containing alloy material that is obtained by nano-crystallizing an amorphous alloy material with heat treatment.

Abstract: In a magnetic core including a core assembly having a structure that multiple thin strip blocks are arranged, the thin strip blocks being formed of multiple laminates of nanocrystalline thin strips made of a nanocrystal-containing alloy material, the thin strip block includes a fixedly joined portion in which the nanocrystalline thin strips adjacent to each other in a lamination direction are fixedly joined together. The fixedly joined portion may include side surfaces of the nanocrystalline thin strips and may be a laser welded portion.

Abstract: In a magnetic core including a core assembly formed of multiple arranged thin strip blocks, each of the thin strip blocks has a structure that multiple nanocrystalline thin strips having a bcc-Fe phase as a main phase are laminated one above another, and an iron loss in the nanocrystalline thin strip positioned at a center of the thin strip block in a thickness direction thereof is lower than an iron loss in the nanocrystalline thin strip positioned in a surface layer of the thin strip block. The nanocrystalline thin strip may be a heat-treated product of an amorphous thin strip made of an amorphous alloy material, and the thin strip block may include a fixedly joined portion in which the nanocrystalline thin strips adjacent to each other in a lamination direction are fixedly joined together.

Abstract: A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The two island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.

Abstract: A substrate 11 is patterned by photolithography to make a first original plate. Next, the pattern 11a of the first original plate is transferred to make a second original plate 12. Next, the second original plate 12 is machined to make a die. Further, the pattern 12b of the second original plate 12 is transferred to make a third original plate 13, which is used as a die. This provides a method for manufacturing a die by which a special shape, for example, a shape having a high aspect ratio portion can be easily formed and a molding obtained therewith.

Abstract: A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The tow island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.

Abstract: A functional multilayer film and a method for manufacturing the same is provided in which the intervals of fine metallic bodies in the thickness direction and the arrangement thereof in the surface direction are regular, and the fine metallic bodies arranged on each layer are aligned in the thickness direction. A functional multilayer film is obtained by fixing a plurality of fine metallic bodies to a matrix made of a dielectric substance. The matrix is obtained by laminating metal-arranged thin films, which each contain a dielectric thin film having a predetermined thickness and the fine metallic bodies arranged on the dielectric thin film. A plurality of recesses is regularly formed on the surface of the dielectric thin film, and the fine metallic bodies are arranged in the lower parts of the recesses.

Abstract: A pressure sensor includes a silicon-on-insulator (SOI) substrate, a glass substrate bonded to the SOI substrate by anode bonding, a silicon island formed on a part of a silicon layer of the SOI substrate and surrounded by a groove extending to an insulating layer of the SOI substrate, a through hole formed in the glass substrate, and an output electrode that is made of a conductive material, is disposed inside the through hole, and is electrically connected to an electrode formed on the glass substrate via the silicon island.

Abstract: A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The tow island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.

Abstract: At one side of a substrate, a vertical diffraction grating is formed integrated with the substrate, at the other side of the substrate, one pair or more of fibers are disposed through which either light goes from the vertical diffraction grating or light comes into the vertical diffraction grating, and a lens member is disposed between the fibers and the vertical diffraction grating. At the other side of the substrate, positioning means which positions a plurality of fibers is formed integrated with the substrate, and a space between the vertical diffraction grating and the fibers constitutes a waveguide.

Abstract: A pressure sensor includes a silicon-on-insulator (SOI) substrate, a glass substrate bonded to the SOI substrate by anode bonding, a silicon island formed on a part of a silicon layer of the SOI substrate and surrounded by a groove extending to an insulating layer of the SOI substrate, a through hole formed in the glass substrate, and an output electrode that is made of a conductive material, is disposed inside the through hole, and is electrically connected to an electrode formed on the glass substrate via the silicon island.

Abstract: When a guide groove for a lens is formed in a single crystal silicon substrate, a rectangular parallelepiped opening is formed having a width smaller than a desired width of the guide groove and is then processed by wet etching using a KOH solution. Two {111} planes are exposed on at least one end surface of the guide groove in an optical axis direction, and the planes described above are inclined toward the substrate side from the upper and the lower sides. Since a protrusion portion protruding to the guide groove side is not provided at the bottom part of the end surface, a light-emitting diode and a lens can be disposed close to each other, thereby forming an optical coupling device having high optical coupling efficiency obtained between elements.

Abstract: A functional multilayer film and a method for manufacturing the same is provided wherein the intervals of fine metallic bodies in the thickness direction of film and the arrangement thereof in the surface direction of film are regular, and the fine metallic bodies arranged on each layer in the surface direction of film are aligned in the thickness direction of film.

Abstract: When a guide groove for a lens is formed in a single crystal silicon substrate, a rectangular parallelepiped opening is formed having a width smaller than a desired width of the guide groove and is then processed by wet etching using a KOH solution. Two {111} planes are exposed on at least one end surface of the guide groove in an optical axis direction, and the planes described above are inclined toward the substrate side from the upper and the lower sides. Since a protrusion portion protruding to the guide groove side is not provided at the bottom part of the end surface, a light-emitting diode and a lens can be disposed close to each other, thereby forming an optical coupling device having high optical coupling efficiency obtained between elements.

Abstract: A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.

Abstract: At one side of a substrate, a vertical diffraction grating is formed integrated with the substrate, at the other side of the substrate, one pair or more of fibers are disposed through which either light goes from the vertical diffraction grating or light comes into the vertical diffraction grating, and a lens member is disposed between the fibers and the vertical diffraction grating. At the other side of the substrate, positioning means which positions a plurality of fibers is formed integrated with the substrate, and a space between the vertical diffraction grating and the fibers constitutes a waveguide.

Abstract: The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.

Abstract: A microactuator has a first substrate, a second substrate, a first comb electrode having a plurality of first comb elements formed on an inner surface of the first substrate, a second comb electrode having a plurality of second comb elements formed on an inner surface of the second substrate, and a connecting film formed by partially removing an interlayer formed on the inner face of any one of the first substrate and the second substrate. The first substrate and the second substrate face each other with a distance and are movable with respect to each other. The first comb elements and the second comb elements are alternately disposed. Any one of the first electrode and the second electrode is bonded to the connecting film. This microactuator is preferably used in magnetic head units and magnetic recording apparatuses.

Abstract: A gyroscope of the invention is provided with a tuning fork having three legs and a support, a top side glass substrate and a bottom side glass substrate between which the tuning fork is interposed, driving movable electrodes disposed on the top surface of each leg, driving fixed electrodes disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.