Patents by Inventor Mutsuo Nakashima

Mutsuo Nakashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20010044071
    Abstract: An ester compound of the following formula (1) is provided.
    Type: Application
    Filed: April 19, 2001
    Publication date: November 22, 2001
    Applicant: Shin-Etsu Chemical Co., Ltd
    Inventors: Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana, Jun Hatakeyama
  • Patent number: 6312867
    Abstract: A novel ester compound having an exo-form 2-alkylbicyclo[2.2.1]heptan-2-yl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.
    Type: Grant
    Filed: November 1, 1999
    Date of Patent: November 6, 2001
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeshi Kinsho, Tsunehiro Nishi, Hideshi Kurihara, Koji Hasegawa, Takeru Watanabe, Osamu Watanabe, Mutsuo Nakashima, Takanobu Takeda, Jun Hatakeyama
  • Patent number: 6309796
    Abstract: The invention provides a high molecular weight silicone compound comprising recurring units of formula (1) and having a weight average molecular weight of 1,000-50,000. Some or all of the hydrogen atoms of carboxyl groups or carboxyl and hydroxyl groups in the silicone compound may be replaced by acid labile groups. Z is di- to hexavalent, non-aromatic, monocyclic or polycyclic hydrocarbon or bridged cyclic hydrocarbon group; Z′ is a di- to hexavalent, normal or branched hydrocarbon group or non-aromatic, monocyclic or polycyclic hydrocarbon or bridged cyclic hydrocarbon group; x, y and z are integers of 1-5 corresponding to the valence of Z and Z′; R1 is —OCHR—R′ —OH or —NHCHR—R′ —OH; R2 is alkyl or alkenyl or a monovalent, non-aromatic, polycyclic hydrocarbon or bridged cyclic hydrocarbon group; p1, p2, p3 and p4 are 0 or positive numbers.
    Type: Grant
    Filed: August 6, 1998
    Date of Patent: October 30, 2001
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Mutsuo Nakashima, Ichiro Kaneko, Toshinobu Ishihara, Junji Tsuchiya, Jun Hatakeyama, Shigehiro Nagura
  • Patent number: 6284429
    Abstract: A novel ester compound having an exo-form 2-alkylbicyclo[2.2.1]heptan-2-yl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.
    Type: Grant
    Filed: February 24, 2000
    Date of Patent: September 4, 2001
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeshi Kinsho, Tsunehiro Nishi, Hideshi Kurihara, Mutsuo Nakashima, Koji Hasegawa, Takeru Watanabe
  • Publication number: 20010003772
    Abstract: A polymer bearing specific cyclic silicon-containing groups is novel. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation and has excellent sensitivity and resolution at a wavelength of less than 300 nm, and high resistance to oxygen plasma etching. The resist composition lends itself to micropatterning for the fabrication of VLSIs.
    Type: Application
    Filed: December 1, 2000
    Publication date: June 14, 2001
    Inventors: Jun Hatakeyama, Takeshi Kinsho, Mutsuo Nakashima, Koji Hasegawa
  • Patent number: 6147249
    Abstract: A novel ester compound having an alkylcycloalkyl or alkylcycloalkenyl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.
    Type: Grant
    Filed: May 10, 1999
    Date of Patent: November 14, 2000
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeru Watanabe, Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa, Jun Hatakeyama
  • Patent number: 6004478
    Abstract: A silacyclohexane compound of the formulas (I) ##STR1## wherein R represents an organic residue, ##STR2## represents an unsubstituted or substituted silicon-containing cyclohexylene group or a 1,4-cyclohexylene group, ##STR3## represents an unsubstituted or substituted phenylene, an unsubstituted or substituted silicon-containing cyclohexylene group or trans-4-sila-1,4-cyclohexylene group, or a 1,4-cyclohexylene group provided that at least one of these residues represents a silicon-containing cyclohexylene group, j, k and l are, respectively, 0 or 1, L.sub.1 and L.sub.2, respectively, represent H or F, m and n are, respectively, 0, 1 or 2 provided that m+n=2, 3 or 4, and X represents H, F or Cl. A liquid crystal composition comprising the silacyclohexane compound of the above formula is also described, along with a liquid crystal device comprising the composition.
    Type: Grant
    Filed: March 15, 1996
    Date of Patent: December 21, 1999
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tsutomu Ogihara, Tatsushi Kaneko, Kazuyuki Asakura, Takeshi Kinsho, Mutsuo Nakashima
  • Patent number: 5972560
    Abstract: The invention provides a high molecular weight silicone compound comprising recurring units of the general formula (1) and having a weight average molecular weight of 1,000-50,000. ##STR1## Z is a di- to hexavalent, monocyclic or polycyclic hydrocarbon group or bridged cyclic hydrocarbon group of 5-12 carbon atoms, R.sup.1 is a substituted or unsubstituted alkyl or alkenyl group of 1-8 carbon atoms, R.sup.2 is an acid labile group, m is 0 or an integer, n is an integer, satisfying m+n.ltoreq.5, x is an integer, p1 and p2 are positive numbers, q is 0 or a positive number, satisfying 0<p1/(p1+p2+q).ltoreq.0.9, 0<p2/(p1+p2+q).ltoreq.0.9, 0.ltoreq.q/(p1+p2+q).ltoreq.0.7, and p1+p2+q=1. A chemically amplified positive resist composition comprising the high molecular weight silicone compound as a base resin is sensitive to actinic radiation and has a high sensitivity and resolution so that it is suitable for fine patterning with electron beams or deep UV.
    Type: Grant
    Filed: January 30, 1998
    Date of Patent: October 26, 1999
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Ichiro Kaneko, Mutsuo Nakashima, Toshinobu Ishihara, Junji Tsuchiya, Jun Hatakeyama, Shigehiro Nagura
  • Patent number: 5951913
    Abstract: A liquid crystal composition having a liquid crystal component with a chemical structure of two saturated rings connected directly to one another, and an additional structural isomer thereof having a silane atom in a different position from the first component and having the structure set forth in formula (1) hereinbelow. ##STR1## This composition provides an improved effect with respect to enhancement in both response speed and T.sub.NI (nematic-isotropic transition temperature) as a high voltage hold ratio as required for TFT driving in addition to also lowering the voltage.
    Type: Grant
    Filed: May 15, 1997
    Date of Patent: September 14, 1999
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tsutomu Ogihara, Tatsushi Kaneko, Kenji Koizumi, Mutsuo Nakashima
  • Patent number: 5866037
    Abstract: Liquid crystal compositions which can improve the low .DELTA.n (refractive index anisotropy) of conventional liquid crystal compositions containing a silacyclohexane compound and which retain a low viscosity and hence show no decrease in response speed. Liquid crystal compositions having a high .DELTA.n of 0.13 to 0.25, a low viscosity of 30 cp or less, a low threshold voltage and a high voltage holding ratio can be obtained by adding thereto, as a required component, a compound having both a silacyclohexane ring and a tolan structure, or a miture of a compound having a silacyclohexane ring and a compound having a tolan structure.
    Type: Grant
    Filed: March 31, 1997
    Date of Patent: February 2, 1999
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tsutomu Ogihara, Tatsushi Kaneko, Toshiaki Takahashi, Mutsuo Nakashima, Takeshi Kinsho, Ryuichi Saito, Hideshi Kurihara
  • Patent number: 5851426
    Abstract: This invention provides twisted nematic liquid crystal compositions obtained by adding a cyclohexane ring-containing optically active compound of the following general formula (1) to a mixture of nematic liquid crystal compounds including at least one silacyclohexane compound, as well as guest-host liquid crystal compositions and liquid crystal display devices utilizing the same.
    Type: Grant
    Filed: June 12, 1997
    Date of Patent: December 22, 1998
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tatsushi Kaneko, Tsutomu Ogihara, Mutsuo Nakashima
  • Patent number: 5762826
    Abstract: A liquid crystal composition comprising one or more types compounds represented by general formula II: ##STR1## and one or more types of compounds selected from the group consisting of: ##STR2## wherein R, rings A and B, X, Y1, Y2, Y3, Y4 and m are defined herein.
    Type: Grant
    Filed: December 21, 1995
    Date of Patent: June 9, 1998
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tatsushi Kaneko, Tsutomu Ogihara, Takeshi Kinsho, Kazuyuki Asakura, Mutsuo Nakashima
  • Patent number: 5730902
    Abstract: An optically active silacyclohexane compound of the formula (I) ##STR1## wherein R represents an organic residue, X represents --CH.sub.2 -- or --O--; Z represents a chiral group having at least one chiral carbon atom; L.sub.1 and L.sub.2 independently represent H or F, n is 0 or 1; ##STR2## represents a trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group whose silicon atom at the 1 or 4 position has H, F, Cl or CH.sub.3, or a 1,4-cyclohexylene group; and ##STR3## represents a trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group whose silicon atom at the 1 or 4 position has H, F, Cl or CH.sub.3, a 1,4-cyclohexylene group or a 1,4-phenylene group provided that at least one of ##STR4## represents the trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group defined above. A liquid crystal composition comprising the compound defined above and a liquid crystal display device comprising the composition are also described.
    Type: Grant
    Filed: August 21, 1996
    Date of Patent: March 24, 1998
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Mutsuo Nakashima, Takaaki Shimizu, Tsutomu Ogihara, Tatsushi Kaneko
  • Patent number: 5693841
    Abstract: A cyclohexanone compound of the following general formula (I) is provided ##STR1## wherein Ar represents a phenyl group or a tolyl group, and R represents a phenyl group, a tolyl group, a linear alkyl group having from 1 to 10 carbon atoms, a mono or difluoroalkyl group having from 1 to 10 carbon atoms, a branched alkyl group having from 3 to 8 carbon atoms or an alkoxyalkyl group having from 2 to 7 carbon atoms. The preparation of the cyclohexanone compound is also described along with processes for preparing liquid crystal compounds from the cyclohexanone compound.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: December 2, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeshi Kinsho, Takaaki Shimizu, Tsutomu Ogihara, Mutsuo Nakashima, Tatsushi Kaneko
  • Patent number: 5679746
    Abstract: A silacyclohexane compound represented by the following general formula (I): ##STR1## wherein R denotes a mono- or di-fluoroalkyl group with 1-10 carbons: ##STR2## denotes a trans-1-silacyclohexylene or a trans-4-silacyclohexylene group whose silicon at position 1 or position 4 has a substitutional group of H, F, Cl or CH.sub.3 ;X denotes a CN, F, Cl, CF.sub.3, CF.sub.2 Cl, CHFCl, OCF.sub.3, OCHF.sub.2, OCF.sub.2 Cl, OCHFCl, (O).sub.3 CY.sub.1 .dbd.CX.sub.1 X.sub.2 (X.sub.1 and Y.sub.1 denote H, F or Cl, and X.sub.2 denotes F or Cl) (O).sub.3 C.sub.p H.sub.q F.sub.r (p denotes 2, 3 or 4, and q and r are integers which satisfy the equation q+r=2p+1, and s denotes 0 or 1), the aforementioned R, or an alkyl or alkoxy group with 1-5 carbons;Y denotes H or F; andZ denotes H or F;and process of manufacturing same.
    Type: Grant
    Filed: December 21, 1995
    Date of Patent: October 21, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Tsutomu Ogihara, Kazuyuki Asakura, Takeshi Kinsho, Tatsushi Kaneko, Mutsuo Nakashima
  • Patent number: 5665271
    Abstract: Silacyclohexane compounds of the following formula (I) or (II) along with intermediate compounds therefor are described ##STR1## wherein R is an organic residue, one of ##STR2## represents a trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group having a substituent of H, F, Cl or CH.sub.3, and the other represents a trans-1,4-cyclohexylene group, or such a trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group as defined above, n is 0 or 1, L.sub.1 represents H or F, L.sub.2 represents H, F or Cl, and Z represents CN, F, Cl or an organic residue, and ##STR3## The processes for preparing the compounds (I) and (II) are also described along with liquid crystal compositions comprising the compounds and the liquid crystal devices comprising the compositions.
    Type: Grant
    Filed: February 12, 1996
    Date of Patent: September 9, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsutomu Ogihara, Takaaki Shimizu, Takeshi Kinsho, Tatsushi Kaneko, Kazuyuki Asakura, Mutsuo Nakashima
  • Patent number: 5650092
    Abstract: A silacyclohexane compound of the following formula (I) ##STR1## wherein R is an unsubstituted or substituted organic residue, W is H, F, Cl or methyl, X is CN, F, Cl or an unsubstituted or substituted organic residue, and Y and Z independently represent H, F or Cl. The silacyclohexane compounds are useful in liquid crystal compositions and also in liquid crystal devices.
    Type: Grant
    Filed: October 20, 1995
    Date of Patent: July 22, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Takeshi Kinsho, Tsutomu Ogihara, Tatsushi Kaneko, Mutsuo Nakashima, Hideshi Kurihara
  • Patent number: 5641431
    Abstract: A silacyclohexanone compound represented by the following general formula (I). ##STR1## wherein Ar denotes a phenyl group or a tolyl group. R denotes a tolyl group, a linear-chain alkyl group with a carbon number of 2-10, a mono- or di-fluoroalkyl group with a carbon number of 1-10, a branched-chain alkyl group with a carbon number of 3-8 or an alkoxyalkyl group with a carbon number of 2-7. Also, a method of manufacturing silacyclohexane-type liquid crystal compounds represented by the general formula (II) ##STR2## and the general formula (III) ##STR3## which are derived from this compound.
    Type: Grant
    Filed: March 23, 1995
    Date of Patent: June 24, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeshi Kinsho, Takaaki Shimizu, Tsutomu Ogihara, Ryuichi Saito, Kazuyuki Asakura, Mutsuo Nakashima
  • Patent number: 5641430
    Abstract: A silacyclohexane compound of the following formula (I) or (II) ##STR1## wherein R is an organic residue, ##STR2## represents an unsubstituted or substituted trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group, L.sub.1 and L.sub.2 independently represent H, F, Cl or CH.sub.3 ; and X represents an organic residue, CN, F or Cl, or ##STR3## wherein R, L.sub.1, L.sub.2 and X are, respectively, as defined above, and at least one of ##STR4## represents an unsubstituted or substituted trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group, and the other may be a trans-1,4-cyclohexylene group. The preparation of these compounds is described along with a composition comprising the compound (I) and/or (II) and a display device comprising the composition.
    Type: Grant
    Filed: December 1, 1995
    Date of Patent: June 24, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Mutsuo Nakashima, Takaaki Shimizu, Tsutomu Ogihara, Takeshi Kinsho, Tatsushi Kaneko, Kazuyuki Asakura, Hideshi Kurihara
  • Patent number: 5624601
    Abstract: A silacyclohexane compound of the following formula (I) ##STR1## wherein R represents an organic residue; ##STR2## represents a trans-1-sila-1,4-cyclohexylene group or trans-4-sila-1,4-cyclohexylene group having a substituent of H, F, Cl or CH.sub.3 ; L.sub.1 represents F, L.sub.2 and L.sub.3 independently represent H, F, Cl or CH.sub.3 ; X represents an organic residue, F or Cl; and n is an integer of 0, 1, or 2 and a and b are, respectively, 0 or 1 provided that a+b=1. Silacyclohexane compounds are useful in liquid crystal compositions and also in liquid crystal devices.
    Type: Grant
    Filed: October 20, 1995
    Date of Patent: April 29, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takaaki Shimizu, Takeshi Kinsho, Tsutomu Ogihara, Tatsushi Kaneko, Mutsuo Nakashima, Hideshi Kurihara