Patents by Inventor Myungchan Cho

Myungchan Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transfer unit, apparatus for treating substrate, and method for treating substrate
    Patent number: 10199249
    Abstract: An apparatus for treating a substrate, an apparatus for transferring a substrate and a method for transferring a substrate are provided. The substrate treating apparatus comprises a receiving unit having a plurality of vertically arranged substrate supporting members and a transferring unit having an upper transfer member transferring a substrate to the receiving unit. The upper transfer member comprises a first arm and a second that are vertically spaced apart from each other and are independently driven to extend horizontally. A plurality of vertically arranged first hands is connected to the first arm and a single hand is connected to the second arm. According to an embodiment, a plurality of substrates can be transferred to a right position.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: February 5, 2019
    Assignee: SEMES CO., LTD.
    Inventors: Hyunho Lee, Myungchan Cho
  • TRANSFER UNIT, APPARATUS FOR TREATING SUBSTRATE, AND METHOD FOR TREATING SUBSTRATE
    Publication number: 20170092522
    Abstract: An apparatus for treating a substrate, an apparatus for transferring a substrate and a method for transferring a substrate are provided. The substrate treating apparatus comprises a receiving unit having a plurality of vertically arranged substrate supporting members and a transferring unit having an upper transfer member transferring a substrate to the receiving unit. The upper transfer member comprises a first arm and a second that are vertically spaced apart from each other and are independently driven to extend horizontally. A plurality of vertically arranged first hands is connected to the first arm and a single hand is connected to the second arm. According to an embodiment, a plurality of substrates can be transferred to a right position.
    Type: Application
    Filed: September 15, 2016
    Publication date: March 30, 2017
    Inventors: Hyunho LEE, Myungchan CHO
  • Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit
    Patent number: 9079304
    Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: July 14, 2015
    Assignee: SEMES CO., LTD.
    Inventors: Woosung Kim, Myungchan Cho
  • TRANSFER UNIT, METHOD FOR CONTROLLING THE TRANSFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE TRANSFER UNIT
    Publication number: 20140121831
    Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
    Type: Application
    Filed: October 29, 2013
    Publication date: May 1, 2014
    Inventors: Woosung Kim, Myungchan Cho