Abstract: A method and apparatus for inspecting isolated features on a reticle is provided wherein the isolated features are analyzed for defects globally as individual, whole features, rather than locally, pixel-by-pixel. In one embodiment, the reticle is imaged to produce pixels having a gray level, and an isolated feature is identified. An energy value for the isolated feature to be inspected is calculated by summing the gray levels of its pixels. A plurality of scatter values for the feature in different directions in the feature is calculated based on the equilibrium center of the feature to produce a unique “signature” for the inspected feature. The energy and scatter values of the inspected feature's signature are then compared with energy and scatter values associated with a corresponding reference feature to determine whether a defect exists in the inspected feature.

Abstract: A method for determining a flow rate of a substance or a thermo-contrast agent in an object including a surface and an upstream region, and the method comprising the steps of (a) providing the upstream region with a thermo-contrast agent; (b) obtaining successive temperature readings of at least a part of the surface of the object; (c) generating a temperature response curve from the temperature readings; (d) extracting a parameter from the temperature response curve; and (e) determining the flow rate from the parameter.

Abstract: Methods for determining the flow rate of a substance within an object by extracting and mathematically manipulating numerical parameters from a thermoimaging temperature response curve of the surface of the object. The methods of the present invention are suitable to determine coronary arteries flow rates and myocardial perfusion rates in open chest conditions.