Patents by Inventor Nadja Erler-Lohse

Nadja Erler-Lohse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FOUP measurement chamber
    Patent number: 10847396
    Abstract: A purge measuring system for front opening unified pods (“FOUPs”) which are positioned in a FOUP nest. Along with at least one unoccupied/occupied sensor for the FOUP nest, at least one gas feed line and one gas discharge line for feeding and discharging flushing gas respectively is provided. At least one pressure sensor, a flowmeter and a regulator valve are arranged in each gas feed line. The valve is regulated based on the measuring results of pressure sensor and flowmeter. At least one moisture sensor and/or one oxygen sensor are arranged in each gas discharge line.
    Type: Grant
    Filed: April 4, 2017
    Date of Patent: November 24, 2020
    Assignee: Fabmatics GmbH
    Inventors: Martin Bachlechner, Nadja Erler-Lohse, Cornelius Günther
  • FOUP Measurement Chamber
    Publication number: 20190131155
    Abstract: The subject matter of the present invention is a purge measuring system for FOUPs which are positioned in a FOUP nest. Along with at least one unoccupied/occupied sensor for the FOUP nest, at least one gas feed line and one gas discharge line for feeding and discharging flushing gas respectively is provided. At least one pressure sensor, a flowmeter and a regulator valve are arranged in each gas feed line. The valve is regulated based on the measuring results of pressure sensor and flowmeter. At least one moisture sensor and/or one oxygen sensor are arranged in each gas discharge line.
    Type: Application
    Filed: April 4, 2017
    Publication date: May 2, 2019
    Inventors: Martin Bachlechner, Nadja Erler-Lohse, Cornelius Günther