Patents by Inventor Naganivetha THIYAGARAJAH

Naganivetha THIYAGARAJAH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11594675
    Abstract: A memory device is provided, the memory device comprising a contact pillar in a dielectric layer. A magnetic tunnel junction may be provided over the contact pillar. A barrier layer may be provided on a sidewall of the magnetic tunnel junction and extending over a horizontal surface of the dielectric layer. A spacer may be provided over the barrier layer.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: February 28, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Suk Hee Jang, Funan Tan, Naganivetha Thiyagarajah, Young Seon You
  • Patent number: 11444030
    Abstract: A semiconductor device may be provided, including a first dielectric layer having a first region and a second region laterally adjacent to the first region. The semiconductor device may further include a bottom electrode at least partially arranged within the first region of the first dielectric layer, a memory element arranged over the bottom electrode, a top electrode arranged over the memory element, and a second dielectric layer arranged over at least the first region of the first dielectric layer. The second dielectric layer may surround the memory element and may surround at least a part of the top electrode. The semiconductor device may further include a third dielectric layer arranged over the second region of the first dielectric layer and laterally adjacent to the second dielectric layer, and a conductive interconnect arranged in the third dielectric layer and the second region of the first dielectric layer.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: September 13, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Hyunwoo Yang, Naganivetha Thiyagarajah, De Wei Shawn Wong, Suk Hee Jang
  • Publication number: 20210384416
    Abstract: A memory device is provided, the memory device comprising a contact pillar in a dielectric layer. A magnetic tunnel junction may be provided over the contact pillar. A barrier layer may be provided on a sidewall of the magnetic tunnel junction and extending over a horizontal surface of the dielectric layer. A spacer may be provided over the barrier layer.
    Type: Application
    Filed: June 4, 2020
    Publication date: December 9, 2021
    Inventors: SUK HEE JANG, FUNAN TAN, NAGANIVETHA THIYAGARAJAH, YOUNG SEON YOU
  • Publication number: 20210159184
    Abstract: A semiconductor device may be provided, including a first dielectric layer having a first region and a second region laterally adjacent to the first region. The semiconductor device may further include a bottom electrode at least partially arranged within the first region of the first dielectric layer, a memory element arranged over the bottom electrode, a top electrode arranged over the memory element, and a second dielectric layer arranged over at least the first region of the first dielectric layer. The second dielectric layer may surround the memory element and may surround at least a part of the top electrode. The semiconductor device may further include a third dielectric layer arranged over the second region of the first dielectric layer and laterally adjacent to the second dielectric layer, and a conductive interconnect arranged in the third dielectric layer and the second region of the first dielectric layer.
    Type: Application
    Filed: November 22, 2019
    Publication date: May 27, 2021
    Inventors: Hyunwoo YANG, Naganivetha THIYAGARAJAH, De Wei Shawn WONG, Suk Hee JANG
  • Patent number: 10847711
    Abstract: A method of fabricating a magnetoresistive device includes etching a magnetoresistive stack using a first etching process to form one or more sidewalls, and etching the stack using a second etching process after forming the one or more sidewalls. Wherein, the second etching process may be relatively more isotropic than the first etching process.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: November 24, 2020
    Assignee: Everspin Technologies, Inc.
    Inventors: Sarin A. Deshpande, Jon Slaughter, Cong Hai, Hyunwoo Yang, Naganivetha Thiyagarajah, Shukai Ye
  • Publication number: 20190173004
    Abstract: A method of fabricating a magnetoresistive device includes etching a magnetoresistive stack using a first etching process to form one or more sidewalls, and etching the stack using a second etching process after forming the one or more sidewalls. Wherein, the second etching process may be relatively more isotropic than the first etching process.
    Type: Application
    Filed: November 28, 2018
    Publication date: June 6, 2019
    Applicant: Everspin Technologies, Inc.
    Inventors: Sarin A. DESHPANDE, Jon SLAUGHTER, Cong HAI, Hyunwoo YANG, Naganivetha THIYAGARAJAH, Shukai YE