Patents by Inventor Namho Yun

Namho Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EDGE RING AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20210217649
    Abstract: An edge ring is disposed to surround a target substrate. The edge ring includes a first upper surface made of silicon carbide, tungsten carbide, magnesium oxide, or yttria, and a second upper surface made of silicon. The second upper surface is formed at a position lower than the first upper surface to face a bottom surface of a peripheral portion of the target substrate.
    Type: Application
    Filed: January 8, 2021
    Publication date: July 15, 2021
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kazuhiko AKAHANE, Toshiya TSUKAHARA, Sungjae LEE, Namho YUN, Jisoo SUH
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20200267826
    Abstract: There is provision of a substrate processing apparatus including a processing vessel, a radio frequency power supply configured to supply radio frequency (RF) current, and a member connected to the processing vessel electrically. The member is configured such that a surface area per unit volume of a first region of the member corresponding to a particular structure of the processing vessel differs from a surface area per unit volume of a second region of the member other than the first region, in order to adjust impedance of the member.
    Type: Application
    Filed: February 18, 2020
    Publication date: August 20, 2020
    Inventors: Daisuke KAWADA, Koichi KAZAMA, Dong suk KIM, Namho YUN, Jisoo SUH
  • PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20200144090
    Abstract: A placing table includes an edge ring disposed to surround a substrate; an electrostatic chuck having a first placing surface on which the substrate is placed and a second placing surface on which the edge ring is placed; and an elastic member placed at a position lower than the first placing surface within a gap between an inner circumferential surface of the edge ring and a side surface of the electrostatic chuck between the first placing surface and the second placing surface.
    Type: Application
    Filed: November 4, 2019
    Publication date: May 7, 2020
    Inventors: Toshiya Tsukahara, Mitsuaki Sato, Junichi Sasaki, Namho Yun, Jisoo Suh