Abstract: A method and apparatus to use an Atomic Force Microscope to take measurements of surface forces, indentation, adhesion and mechanical properties such as hardness and elasticity. The force between a probe mounted cantilever and a sample is measured as a function cantilever deflection measured by a electron tunneling microscope. The sample and the tip of the tunneling microscope are each mounted on piezoelectric manipulators which provide for position control. Position of the sample and probe are measured from the voltages applied to the piezoelectric manipulators. Penetration is determined by the relative motion between the probe and sample. Presently, this invention has a force resolution of 1 nN and a depth resolution of 0.02 nm.