Abstract: A super-resolution microscope comprises: an illumination optical system that condenses a first illumination light beam for exciting the molecule from a stable state to a first quantum state and a second illumination light beam for further transitioning the molecule onto a sample in a manner that the first and the second illumination light beams are partially overlapped; a scanning section that scans the sample by relatively displacing the first and the second illumination light beams and the sample; a detection section that detects an optical response signal emitted from the sample; and a phase plate that is arranged in the illumination optical system and has M surface areas for modulating the phase of the second illumination light beam, wherein the phase plate comprises a monolayer optical thin film with M surface areas formed on an optical substrate with a thickness that satisfies the predetermined conditional expression.

Abstract: A super-resolution microscope comprises: an illumination optical system that condenses a first illumination light beam for exciting the molecule from a stable state to a first quantum state and a second illumination light beam for further transitioning the molecule onto a sample in a manner that the first and the second illumination light beams are partially overlapped; a scanning section that scans the sample by relatively displacing the first and the second illumination light beams and the sample; a detection section that detects an optical response signal emitted from the sample; and a phase plate that is arranged in the illumination optical system and has M surface areas for modulating the phase of the second illumination light beam, wherein the phase plate comprises a monolayer optical thin film with M surface areas formed on an optical substrate with a thickness that satisfies the predetermined conditional expression.