Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: A control device controls a water supply device that supplies irrigation water to an open farm field in which a plant grows. The control device includes a storage unit, a calculation unit, and an output unit. The storage unit stores an environment value of each of a plurality of divided areas obtained by dividing the farm field and weather forecast of the farm field. The calculation unit calculates, based on an environment value and the weather forecast, an irrigation schedule in which supply time and amount of the irrigation water individually supplied to each of the plurality of divided areas during the irrigation period are determined. The output unit outputs to the water supply device, a control signal to control supply and no supply of the irrigation water to each of the plurality of divided areas based on the irrigation schedule.

Abstract: An inspection device includes an output unit, a storage unit, and an inspection unit. The output unit outputs a control signal for controlling a water supply valve to control supply and no supply of irrigation water from a water supply pipe in an open farm field, between an open state and a closed state. The storage unit stores water pressures of irrigation water as detected in a period from a state where the water supply valve becomes in the open state and irrigation water is supplied from the water supply pipe until an expected time elapses after the water supply valve becomes in the closed state and the water supply pipe is expected to be filled with irrigation water. The inspection unit calculates a time constant of water pressure based on the water pressures and inspects the water supply pipe based on the time constant.

Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: An optical component for reflecting incident light at a predetermined reflection angle, includes: a scan portion having a reflection surface and scanning the reflection angle; and a package accommodating the scan portion, and having a main body of a box shape with one open surface and a lid which covers the one open surface and transmits the incident light and reflected light. The lid includes at least one base portion having a counter surface facing the reflection surface and a back surface opposed to the counter surface, and a diffraction lens portion arranged on at least one of the counter surface and the back surface and having a periodic concavo-convex shape so as to widen the reflection angle.

Abstract: A humidity sensor includes a detection device with a capacitance changing with humidity at a first ratio and a reference device with a capacitance changing with humidity at a second ratio smaller than the first ratio. The detection device has detection electrodes facing each other with a first gap and a detection humidity-sensitive film covering the detection electrodes. The reference device has reference electrodes facing each other with a second gap and a reference humidity-sensitive film covering the reference electrodes. The detection humidity-sensitive film and the reference humidity-sensitive film are made from the same material and have the same thickness. The detection electrodes and the reference electrodes are made from the same material and have the same width and thickness. The second ratio peaks when the second gap is equal to a predetermined value. The second gap is smaller than the first gap and the predetermined value.

Abstract: A humidity sensor includes a humidity detention section, a pad section, and a dam section. The humidity detention section includes a pair of detection electrodes facing each other on a predetermined surface of a substrate and a humidity-sensitive film covering the detection electrodes. The pad section is spaced from the humidity detection section on the surface and covered with a protection gel section. The dam section is located between the humidity detection section and the pad section on the surface. The dam section includes a dam wire that is made from the same material as the detection electrodes and a dam humidity-sensitive film that is made from the same material as the humidity-sensitive film and covers at least part of the dam wire.

Abstract: A humidity sensor includes a detection device with a capacitance changing with humidity at a first ratio and a reference device with a capacitance changing with humidity at a second ratio smaller than the first ratio. The detection device has detection electrodes facing each other with a first gap and a detection humidity-sensitive film covering the detection electrodes. The reference device has reference electrodes facing each other with a second gap and a reference humidity-sensitive film covering the reference electrodes. The detection humidity-sensitive film and the reference humidity-sensitive film are made from the same material and have the same thickness. The detection electrodes and the reference electrodes are made from the same material and have the same width and thickness. The second ratio peaks when the second gap is equal to a predetermined value. The second gap is smaller than the first gap and the predetermined value.

Abstract: A humidity sensor includes a humidity detention section, a pad section, and a dam section. The humidity detention section includes a pair of detection electrodes facing each other on a predetermined surface of a substrate and a humidity-sensitive film covering the detection electrodes. The pad section is spaced from the humidity detection section on the surface and covered with a protection gel section. The dam section is located between the humidity detection section and the pad section on the surface. The dam section includes a dam wire that is made from the same material as the detection electrodes and a dam humidity-sensitive film that is made from the same material as the humidity-sensitive film and covers at least part of the dam wire.