Abstract: A humidity sensor includes: a sensor chip including a capacitive humidity sensor element and a connection electrode, wherein the capacitive humidity sensor element includes a humidity sensitive film having relative permittivity changeable in accordance with humidity, and wherein the connection electrode is electrically connected to the humidity sensor element; a lead plate electrically connected to the connection electrode; and a mold for covering a connection portion between the connection electrode and the lead plate. The mold is disposed on the sensor chip and includes a groove. The humidity sensitive film is disposed in the groove. The humidity sensitive film has a height in the groove, the height equal to or lower than a surface of the mold. The height of the humidity sensitive film in the groove is homogeneous.

Abstract: A capacitive humidity sensor includes a detecting portion and a reference portion. The detecting portion includes a first sensor element, and a capacitance of the first sensor element varies in accordance with humidity. The reference portion includes a second sensor element and a capacitor. The second sensor element is connected to the first sensor element in series, and a capacitance of the second sensor element varies in accordance with the humidity. The capacitor has a constant capacitance relative to a humidity variation. The first sensor element has a gradient of a capacitance variation to the humidity variation, which is different from a gradient of the second sensor element.

Abstract: A capacitive humidity sensor includes: a humidity sensing element; a substrate; and an insulation film. The humidity sensing element includes a pair of comb-shape electrodes and a humidity sensitive film. The comb-shape electrodes are surrounded by a dam provided by a part of the insulation film. The insulation film on the comb-shape electrodes has a first height. The part of the insulation film on the dam has a second height higher than the first height. The humidity sensitive film has a height equal to or lower than the second height, and is disposed inside of the dam. The dam further includes a first ring pattern made of a same material as the comb-shape electrodes.

Abstract: A capacitive humidity sensor includes a detecting portion and a reference portion. The detecting portion includes a first sensor element, and a capacitance of the first sensor element varies in accordance with humidity. The reference portion includes a second sensor element and a capacitor. The second sensor element is connected to the first sensor element in series, and a capacitance of the second sensor element varies in accordance with the humidity. The capacitor has a constant capacitance relative to a humidity variation. The first sensor element has a gradient of a capacitance variation to the humidity variation, which is different from a gradient of the second sensor element.

Abstract: A humidity sensor includes: a sensor chip including a capacitive humidity sensor element and a connection electrode, wherein the capacitive humidity sensor element includes a humidity sensitive film having relative permittivity changeable in accordance with humidity, and wherein the connection electrode is electrically connected to the humidity sensor element; a lead plate electrically connected to the connection electrode; and a mold for covering a connection portion between the connection electrode and the lead plate. The mold is disposed on the sensor chip and includes a groove. The humidity sensitive film is disposed in the groove. The humidity sensitive film has a height in the groove, the height equal to or lower than a surface of the mold. The height of the humidity sensitive film in the groove is homogeneous.

Abstract: A capacitive humidity sensor includes: a humidity sensing element; a substrate; and an insulation film. The humidity sensing element includes a pair of comb-shape electrodes and a humidity sensitive film. The comb-shape electrodes are surrounded by a dam provided by a part of the insulation film. The insulation film on the comb-shape electrodes has a first height. The part of the insulation film on the dam has a second height higher than the first height. The humidity sensitive film has a height equal to or lower than the second height, and is disposed inside of the dam. The dam further includes a first ring pattern made of a same material as the comb-shape electrodes.