Abstract: A method of manufacturing a semiconductor device includes: forming a first trench from an upper surface side of a semiconductor substrate; burying the first trench with an insulated gate electrode structure; forming a base region at an upper part of the semiconductor substrate so as to be in contact with the first trench; forming a first main electrode region at an upper part of the base region so as to be in contact with the first trench; forming a second trench by removing a part of the first main electrode region; implanting first impurity ions entirely into a side wall surface of the second trench from a diagonally upper side; implanting second impurity ions into a bottom surface of the second trench to form a contact region at a bottom of the second trench; and forming a second main electrode region on a bottom surface side of the semiconductor substrate.

Abstract: Provided is a semiconductor device manufacturing method including a process of annealing a semiconductor wafer in a state in which a supported portion on a lower surface of the semiconductor wafer is supported by using a supporting portion, wherein the supported portion includes one or a plurality of supporting portions and the supporting portion includes one or a plurality of supporting portions, the method comprising: forming impurity regions including a first impurity in a region which is overlapped with the supported portion in a top view and which is apart from an edge of the semiconductor wafer; annealing the semiconductor wafer in a state in which the lower surface of the semiconductor wafer is supported by the supporting portion; and removing the impurity regions by removing a region including the lower surface of the semiconductor wafer.

Abstract: A first semiconductor region of a second conductivity type, a second semiconductor region of a first conductivity type, gate trenches, a gate insulating film, gate electrodes, and an interlayer insulating film are formed. Next, a contact hole that penetrates through the interlayer insulating film and reaches the first semiconductor region is formed, and in a surface layer of the first semiconductor region exposed at a bottom of the contact hole, a third semiconductor region of the second conductivity type is formed by an ion implantation using, as a mask, a polymer formed herewith; and after the ion implantation, the polymer is removed. Next, a fourth semiconductor region of the second conductivity type, a first electrode, and a second electrode are formed.

Abstract: An interlayer insulating film is dry etched using a CHF3 gas and by using, as a mask, a resist film having a first opening and a second opening that is wider than the first opening, thereby forming a first contact hole of a predetermined depth in the first opening and forming a second contact hole in the second opening. The gas in a furnace is switched to a C4F8 gas and the first contact hole is embedded with a polymer by the C4F8 gas. The gas in the furnace is switched to a CHF3 gas. With the first contact hole protected by the polymer, the interlayer insulating film is dry etched using the same resist film as a mask, making a depth of the second contact hole a predetermined depth deeper than that of the first contact hole. Thereafter, the resist film and the polymer are removed.

Abstract: An interlayer insulating film is dry etched using a CHF3 gas and by using, as a mask, a resist film having a first opening and a second opening that is wider than the first opening, thereby forming a first contact hole of a predetermined depth in the first opening and forming a second contact hole in the second opening. The gas in a furnace is switched to a C4F8 gas and the first contact hole is embedded with a polymer by the C4F8 gas. The gas in the furnace is switched to a CHF3 gas. With the first contact hole protected by the polymer, the interlayer insulating film is dry etched using the same resist film as a mask, making a depth of the second contact hole a predetermined depth deeper than that of the first contact hole. Thereafter, the resist film and the polymer are removed.