Patents by Inventor Naoki Murasato
Naoki Murasato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230256664Abstract: In an imprint apparatus for forming a pattern of a curable composition on a substrate using a mold, an air flow is generated between a mold holding unit holding a member and the member to remove foreign particles, in a state where the member held by the mold holding unit is deformed in a direction perpendicular to a surface of the member.Type: ApplicationFiled: February 9, 2023Publication date: August 17, 2023Inventor: NAOKI MURASATO
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Patent number: 11656547Abstract: An imprint apparatus for forming a pattern of an imprint material on a substrate by using a mold including a pattern formation area, the imprint apparatus includes a detection unit configured to detect a contact state of the imprint material on the substrate with the mold, a light modulation element configured to control an intensity distribution of irradiation light irradiating the substrate, and a control unit configured to control a timing of irradiating the substrate with the irradiation light having the intensity distribution controlled by the light modulation element based on a detection result of the detection unit.Type: GrantFiled: March 19, 2020Date of Patent: May 23, 2023Assignee: Canon Kabushiki KaishaInventors: Naoki Murasato, Takafumi Miyaharu
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Patent number: 11426906Abstract: An imprint apparatus cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold. The imprint apparatus includes a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material, and a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material.Type: GrantFiled: May 15, 2019Date of Patent: August 30, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Naoki Murasato, Ken Minoda
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Patent number: 11187977Abstract: An imprint apparatus cures an imprint material on a shot region of a substrate by light irradiation and forms a pattern on the shot region in a state in which a mold is in contact with the imprint material. The apparatus includes a shutter mechanism including a shutter plate configured to control light irradiation to the imprint material on the shot region and an actuator configured to drive the shutter plate, and a driving mechanism configured to change relative positions of the substrate and the mold. The shutter plate includes a first passing portion configured to irradiate a part out of a whole of the imprint material on the shot region with light and a second passing portion configured to irradiate the whole of the imprint material on the shot region.Type: GrantFiled: September 13, 2018Date of Patent: November 30, 2021Assignee: CANON KABUSHIKI KAISHAInventors: Naoki Murasato, Ken Minoda
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Patent number: 10828805Abstract: An imprint apparatus for forming a pattern in an imprint material on a substrate using an original as a mold, comprises an ultraviolet light generation device which irradiates with ultraviolet light which is curing light for curing the imprint material, and a control unit which controls a light amount of the ultraviolet light which is curing light. The control unit configured to perform a control of the light amount of the ultraviolet light acquires data of a defect distribution of the pattern formed on the substrate by the mold, and performs the control of the light amount of the ultraviolet light in a plurality of shot areas on the substrate based on the acquired data of the defect distribution.Type: GrantFiled: January 25, 2017Date of Patent: November 10, 2020Assignee: CANON KABUSHIKI KAISHAInventor: Naoki Murasato
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Publication number: 20200310247Abstract: An imprint apparatus for forming a pattern of an imprint material on a substrate by using a mold including a pattern formation area, the imprint apparatus includes a detection unit configured to detect a contact state of the imprint material on the substrate with the mold, a light modulation element configured to control an intensity distribution of irradiation light irradiating the substrate, and a control unit configured to control a timing of irradiating the substrate with the irradiation light having the intensity distribution controlled by the light modulation element based on a detection result of the detection unit.Type: ApplicationFiled: March 19, 2020Publication date: October 1, 2020Inventors: Naoki Murasato, Takafumi Miyaharu
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Patent number: 10409156Abstract: A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.Type: GrantFiled: January 21, 2016Date of Patent: September 10, 2019Assignee: CANON KABUSHIKI KAISHAInventors: Byung-Jin Choi, Mahadevan Ganapathisubramanian, Naoki Murasato, Yoshikazu Miyajima
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Publication number: 20190263031Abstract: An imprint apparatus cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold. The imprint apparatus includes a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material, and a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material.Type: ApplicationFiled: May 15, 2019Publication date: August 29, 2019Inventors: Naoki Murasato, Ken Minoda
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Publication number: 20190086796Abstract: An imprint apparatus cures an imprint material on a shot region of a substrate by light irradiation and forms a pattern on the shot region in a state in which a mold is in contact with the imprint material. The apparatus includes a shutter mechanism including a shutter plate configured to control light irradiation to the imprint material on the shot region and an actuator configured to drive the shutter plate, and a driving mechanism configured to change relative positions of the substrate and the mold. The shutter plate includes a first passing portion configured to irradiate a part out of a whole of the imprint material on the shot region with light and a second passing portion configured to irradiate the whole of the imprint material on the shot region.Type: ApplicationFiled: September 13, 2018Publication date: March 21, 2019Inventors: Naoki Murasato, Ken Minoda
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Publication number: 20180067392Abstract: An imprint apparatus performs an imprint process of bringing a mold into contact with an imprint material on a substrate and curing the imprint material by light irradiation. The apparatus includes a light source which emits light to irradiate the imprint material that is in contact with the mold, a light blocking portion which defines an irradiation region of the light emitted by the light source, a driver which drives the light blocking portion, an image capture which has a field of view capable of capturing a region irradiated with the light emitted by the light source, and a controller which generates, based on an image of the mold provided from the image capture, controls information which controls driving of the light blocking portion by the driver.Type: ApplicationFiled: August 29, 2017Publication date: March 8, 2018Inventor: Naoki Murasato
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Publication number: 20170217054Abstract: An imprint apparatus for forming a pattern in an imprint material on a substrate using an original as a mold, comprises an ultraviolet light generation device which irradiates with ultraviolet light which is curing light for curing the imprint material, and a control unit which controls a light amount of the ultraviolet light which is curing light. The control unit configured to perform a control of the light amount of the ultraviolet light acquires data of a defect distribution of the pattern formed on the substrate by the mold, and performs the control of the light amount of the ultraviolet light in a plurality of shot areas on the substrate based on the acquired data of the defect distribution.Type: ApplicationFiled: January 25, 2017Publication date: August 3, 2017Inventor: Naoki Murasato
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Publication number: 20160236400Abstract: A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.Type: ApplicationFiled: January 21, 2016Publication date: August 18, 2016Inventors: Byung-Jin Choi, Mahadevan Ganapathisubramanian, Naoki Murasato, Yoshikazu Miyajima
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Patent number: 7907358Abstract: A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.Type: GrantFiled: August 28, 2009Date of Patent: March 15, 2011Assignee: Canon Kabushiki KaishaInventor: Naoki Murasato
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Publication number: 20100053783Abstract: A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.Type: ApplicationFiled: August 28, 2009Publication date: March 4, 2010Applicant: CANON KABUSHIKI KAISHAInventor: Naoki Murasato
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Patent number: 7345834Abstract: A holding system for holding an optical element. The holding system includes a ring-like inner holding member disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, and a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.Type: GrantFiled: May 10, 2006Date of Patent: March 18, 2008Assignee: Canon Kabushiki KaishaInventor: Naoki Murasato
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Patent number: 7116500Abstract: A holding system for holding an optical element. The holding system includes a ring-like inner holding member, disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, in which the inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators, a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points, and three elastic members for supporting the holding member. The inner holding member supports the optical element by use of one pair of the pieces, which are disposed opposed to each other, in which one pair of the driving units of the inner holding member is disposed opposed to each other and provided on the inner holding member at two points. Each point is defined between the one pair of opposed pieces.Type: GrantFiled: October 12, 2005Date of Patent: October 3, 2006Assignee: Canon Kabushiki KaishaInventor: Naoki Murasato
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Publication number: 20060198036Abstract: A holding system for holding an optical element. The holding system includes a ring-like inner holding member disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, and a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.Type: ApplicationFiled: May 10, 2006Publication date: September 7, 2006Applicant: CANON KABUSHIKI KAISHAInventor: Naoki Murasato
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Publication number: 20060082907Abstract: Disclosed in this specification are an optical element holding system, a barrel usable therewith, and an exposure apparatus and an exposure method usable therewith. In one preferred form, the optical element holding system includes a ring-like inner holding member which is disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces. The optical element holding system further includes a ring-like outer holding member which is disposed at an outer periphery of the inner holding member and is connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.Type: ApplicationFiled: October 12, 2005Publication date: April 20, 2006Applicant: CANON KABUSHIKI KAISHAInventor: Naoki Murasato
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Patent number: 7031082Abstract: A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.Type: GrantFiled: February 17, 2004Date of Patent: April 18, 2006Assignee: Canon Kabushiki KaishaInventor: Naoki Murasato
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Publication number: 20040165287Abstract: A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.Type: ApplicationFiled: February 17, 2004Publication date: August 26, 2004Inventor: Naoki Murasato