Abstract: Provided is a shutter mechanism for opening and closing a substrate-facing surface (30) of a target (3). The shutter mechanism is provided with: a shutter (6) having first and second shutter plates (11A, 11B) having first and second edge parts (30a, 30b), respectively; and first and second rotary support parts (13A, 13B) for supporting the first and second shutter plates (11A, 11B) so as to be able to rotate about first and second rotary shafts (SA, SB) extending in the direction of a line normal to the substrate-facing surface (30) so that the first and second shutter plates (11A, 11B) can move between an open position and a closed position at which the first and second edge parts (30a, 30b) overlap.

Abstract: A glass film transfer apparatus includes a wind-off section that winds off the glass film from a roll around which the glass film is wound, a long interleaf being laminated on the glass film; a glass film transfer section that transfers the glass film which is wound off from the wind-off section and is separated from the interleaf; a take-up section that takes up the glass film transferred by the glass film transfer section in the form of roll, while laminating the long interleaf on the glass film; and an interleaf transfer section that carries out the interleaf separated from the glass film which is wound off from the wind-off section, and carries in the interleaf toward the take-up section. Furthermore, the glass film transfer apparatus includes a take-up adjusting mechanism that adjusts a take-up state of the interleaf and the glass film in the take-up section.

Abstract: Provided is a substrate transport roller (2a) capable of ensuring a broad temperature-control region on a substrate, without reducing substrate transport quality.

Abstract: Provided is a deposition device which can secure work space without vertical overlap of the deposition unit and the units upstream and downstream thereof. This deposition device is provided with a deposition unit (16), and upstream and downstream units (14, 18) arranged to the left and right thereof.

Abstract: A degassing device, allowing efficient maintenance and including upper and lower rollers which advance a film-forming material in an advancement direction while vertically conveying the same, a plate heater arranged adjacently to the film-forming material moving back and forth between the rollers, and a chamber including an outer wall. The outer wall includes a front wall and a rear wall each including an upper roller support unit and a lower roller support unit. In at least one of the front wall and the rear wall, a between-roller opening is formed in the region between the upper roller support unit and the lower roller support unit, and the between-roller openings have a shape cutting across the moving film-forming material and the plate heater in the advancement direction.

Abstract: A glass film transfer apparatus includes a wind-off section that winds off the glass film from a roll around which the glass film is wound, a long interleaf being laminated on the glass film; a glass film transfer section that transfers the glass film which is wound off from the wind-off section and is separated from the interleaf; a take-up section that takes up the glass film transferred by the glass film transfer section in the form of roll, while laminating the long interleaf on the glass film; and an interleaf transfer section that carries out the interleaf separated from the glass film which is wound off from the wind-off section, and carries in the interleaf toward the take-up section. Furthermore, the glass film transfer apparatus includes a take-up adjusting mechanism that adjusts a take-up state of the interleaf and the glass film in the take-up section.

Abstract: Provided is a substrate transport roller (2a) capable of ensuring a broad temperature-control region on a substrate, without reducing substrate transport quality.

Abstract: Provided is an apparatus capable of preventing the intrusion of particles into spaces in a web substrate roll. The apparatus forms web substrate rolls by continuously winding a long web substrate (21), on which edge tabs (14) have been installed, in a chamber (5) under vacuum or under reduced pressure, and is provided with: a winding section (4) for winding the web substrate (21) and overlaying the edge tabs (14); and a filler-supplying section for adding a filler (20) between portions of the web substrate (21) that are adjacent to each other in the radial direction and are between the two edge tabs (14) by supplying the filler (20) to the web substrate (21) that is being wound on the winding section (4).

Abstract: A particulate deodorant resin composition comprising a water-absorbent resin and powdery zeolite dispersed within the resin particles. The composition exhibits the effect of deodorizing the absorbed body fluid while retaining the water-absorbent function inherent in water-absorbent resins. When, therefore, used as sanitary materials such as paper diaper or sanitary goods, it is featured by not only the inherent absorbent effect, but also the deodorant effect.