Abstract: A displacement sensor includes a linear light source which emits a linear beam, a beam splitter, a line sensor, and an imaging lens. The linear light source is disposed with an inclination of a predetermined angle with respect to a perpendicular line of an optical axis of the imaging lens. The imaging lens forms an image of the linear light source at a position conjugate with the linear light source with an inclination of a predetermined angle with respect to the perpendicular line of the optical axis of the imaging lens. The beam splitter is disposed between the linear light source and the imaging lens. The line sensor is disposed at a position conjugate with the image formed by the imaging lens through the imaging lens and the beam splitter so that the optical axis of the imaging lens has the inclination of the predetermined angle with respect to the perpendicular line of the optical axis reflected by the beam splitter.

Abstract: A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.

Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.

Abstract: A displacement sensor includes a linear light source which emits a linear beam, a beam splitter, a line sensor, and an imaging lens. The linear light source is disposed with an inclination of a predetermined angle with respect to a perpendicular line of an optical axis of the imaging lens. The imaging lens forms an image of the linear light source at a position conjugate with the linear light source with an inclination of a predetermined angle with respect to the perpendicular line of the optical axis of the imaging lens. The beam splitter is disposed between the linear light source and the imaging lens. The line sensor is disposed at a position conjugate with the image formed by the imaging lens through the imaging lens and the beam splitter so that the optical axis of the imaging lens has the inclination of the predetermined angle with respect to the perpendicular line of the optical axis reflected by the beam splitter.

Abstract: A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.

Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

Abstract: An apparatus for measuring the position and shape of a pattern formed on a sheet includes a sheet on which a pattern is formed, a camera holding mechanism that is disposed perpendicular to a transportation direction of the sheet, at least one camera that is disposed such that the camera is movable in a longitudinal direction of the camera holding mechanism, and an image processing computer that processes an image picked up by the at least one camera. In the measuring apparatus, when calibration is performed, calibration is performed with reference to a picked up image of the coating pattern and a picked up image of a reference body for calibration.

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract: An apparatus for measuring the position and shape of a pattern formed on a sheet includes a sheet on which a pattern is formed, a camera holding mechanism that is disposed perpendicular to a transportation direction of the sheet, at least one camera that is disposed such that the camera is movable in a longitudinal direction of the camera holding mechanism, and an image processing computer that processes an image picked up by the at least one camera. In the measuring apparatus, when calibration is performed, calibration is performed with reference to a picked up image of the coating pattern and a picked up image of a reference body for calibration.

Abstract: In a position measuring system for measuring a position of a preset target portion of a conveyed sheet-like material with a camera, the system comprises a first camera unit installed substantially above one edge of the sheet-like material, including an image pickup device to receive a focused image of the sheet-like material, and taking an image of the target portion of the sheet-like material, a second camera unit installed substantially above the other edge of the sheet-like material, including an image pickup device to receive a focused image of the sheet-like material, and taking an image of the target portion of the sheet-like material, and a measuring unit for, based on variations of positions of the target portion from preset reference positions in the images of the sheet-like material focused on the respective image pickup devices, determining occurrence of a pass line fluctuation that displaces the sheet-like material in a vertical direction, and measuring a position deviation of the target portion.

Abstract: A focus error detecting optical system has an optical parameter which makes a focus lock-in range by a focus error signal be a value capable of detecting focus on a front surface of a cover glass and focus on a back surface thereof separately. A control section, based on the focus error signal obtained by the focus error detecting optical system, brings a focal point of an observational optical system to a focus position. Further, focus error detecting optical systems include optical units each having an optical parameter corresponding to a numerical aperture of respective objective lenses. A control section selects the optical unit of the focus error detecting optical system corresponding to the objective lens in use. The control section, using a focus error signal obtained by the selected focus error detecting optical system, brings a focal point of an observational optical system to a focus position.

Abstract: A focus error detecting optical system has an optical parameter which makes a focus lock-in range by a focus error signal be a value capable of detecting focus on a front surface of a cover glass and focus on aback surface thereof separately. A control section, based on the focus error signal obtained by the focus error detecting optical system, brings a focal point of an observational optical system to a focus position. Further, focus error detecting optical systems include optical units each having an optical parameter corresponding to a numerical aperture of respective objective lenses. A control section selects the optical unit of the focus error detecting optical system corresponding to the objective lens in use. The control section, using a focus error signal obtained by the selected focus error detecting optical system, brings a focal point of an observational optical system to a focus position.

Abstract: This invention relates to a method and an apparatus for measuring optical characteristics such as Mueller matrices or double refraction of an optical disk in which a laser light which is focussed irradiates on an optical disk so that a tracking and a focus of the irradiation light is controlled based on the reflected light from the optical disk while polarization characteristics of the optical disk are measured based on the reflection light.