Abstract: A power supply device for an electric discharge machine includes a DC power supply which is connected in parallel to an electrode gap, a plurality of switching elements which are in parallel to each other and which are arranged between the electrode gap and the DC power supply, a current value acquisition unit for acquiring a value of a current, and an ON-OFF control unit which, during the time when the current value reaches a predetermined value until the time when the current starts to fall, sets a cycle for switching the plurality of switching elements from off to on to the same cycle, switches the plurality of switching elements from off to on in a predetermined order for each timing of a phase of 90°, which is 360° divided by the number of the plurality of switching elements, sets an ON-period of each of the plurality of switching elements based on a difference between the value of the current and the predetermined value, and performs ON-OFF control of the plurality of switching elements based on the cyc

Abstract: A power supply device for an electric discharge machine includes a current supply unit for supplying a pulsed current to an electrode gap and a current regeneration unit for regenerating the current. The current supply unit includes a DC power supply, a first switching element, and a second switching element. The current regeneration unit includes a capacitor arranged between a first connection point between an electrode and the first switching element and a second connection point between a workpiece and the second switching element, and a third switching element which is arranged between a third connection point between the first connection point and the DC power supply and a fourth connection point between the second connection point and the capacitor and which is turned on from the start of current regeneration until the current value reaches zero, whereby regeneration current fall time is reduced.

Abstract: A plurality of individual electrodes each extending in a first direction are arranged in a second direction intersecting with the first direction. A piezoelectric actuator has a drive region where the individual electrode, a piezoelectric layer, and a common electrode overlap as viewed in a stack direction and a non-drive region, adjacent to the drive region, where the individual electrode, the piezoelectric layer, and the common electrode do not overlap as viewed in the stack direction. The individual electrode has a first portion included in the drive region and a second portion included in the non-drive region and located adjacent to the first portion in the first direction. The first portion includes a narrower portion whose width is less than a width in the second direction at a boundary between the first portion and the second portion.

Abstract: A power supply device for an electric discharge machine includes a DC power supply which is connected in parallel to an electrode gap, a plurality of switching elements which are in parallel to each other and which are arranged between the electrode gap and the DC power supply, a current value acquisition unit for acquiring a value of a current, and an ON-OFF control unit which, during the time when the current value reaches a predetermined value until the time when the current starts to fall, sets a cycle for switching the plurality of switching elements from off to on to the same cycle, switches the plurality of switching elements from off to on in a predetermined order for each timing of a phase of 90°, which is 360° divided by the number of the plurality of switching elements, sets an ON-period of each of the plurality of switching elements based on a difference between the value of the current and the predetermined value, and performs ON-OFF control of the plurality of switching elements based on the cyc

Abstract: A power supply device for an electric discharge machine includes a current supply unit for supplying a pulsed current to an electrode gap and a current regeneration unit for regenerating the current. The current supply unit includes a DC power supply, a first switching element, and a second switching element. The current regeneration unit includes a capacitor arranged between a first connection point between an electrode and the first switching element and a second connection point between a workpiece and the second switching element, and a third switching element which is arranged between a third connection point between the first connection point and the DC power supply and a fourth connection point between the second connection point and the capacitor and which is turned on from the start of current regeneration until the current value reaches zero, whereby regeneration current fall time is reduced.

Abstract: Provided is a piezoelectric device including: a substrate (10) on which a plurality of recesses (12) are provided; a vibrating plate (50) which is provided on one surface side of the substrate; and a piezoelectric element (300) which is provided over the vibrating plate (50) and on which a first electrode (60), a piezoelectric layer (70), and a second electrode (80) are laminated from the substrate (10) side, in which the first electrode (60) is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (12), and the piezoelectric layer (70) is extended to the outer side of the first electrode (60) in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess (12) in the parallel arrangement direction, the vibrating plate (50) contains a zirconium oxide layer (52), and when an area of the zirconium oxide layer (52) corres

Abstract: A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.

Abstract: A piezoelectric device includes a vibration plate, and a first piezoelectric element and a second piezoelectric element that vibrate the vibration plate. The first piezoelectric element and the second piezoelectric element include a piezoelectric layer extending between the first piezoelectric element and the second piezoelectric element. In a region between the first piezoelectric element and the second piezoelectric element in the piezoelectric layer, a first opening portion and a second opening portion are formed in a second direction intersecting a first direction in which the first piezoelectric element and the second piezoelectric element are disposed so as to interpose a vibration suppressing portion, which is a portion of the piezoelectric layer.

Abstract: A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Abstract: A liquid ejecting head includes a flow path substrate in which a nozzle through which liquid is ejected, a pressure chamber that communicates with the nozzle and a liquid supply chamber that communicates with the pressure chamber are formed, a vibration plate that is installed on the flow path substrate and overlaps with the pressure chamber and the liquid supply chamber, and a piezoelectric element that is formed on the vibration plate on an opposite side from the pressure chamber, in which a portion of the vibration plate overlapping with the pressure chamber is thinner in a thickness than a portion of the vibration plate overlapping with the liquid supply chamber.

Abstract: A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.

Abstract: A piezoelectric device including a pressure chamber, a piezoelectric element, and a vibration plate, in which the piezoelectric element is provided with a first electrode, a second electrode, and a piezoelectric layer, the vibration plate has a first portion overlapping the piezoelectric element and a second portion having a thickness smaller than that of the first portion and overlapping an inner peripheral surface of a side wall of the pressure chamber, a side surface of the piezoelectric element which intersects the vibration plate has a first surface inclined at a first angle, the vibration plate has a second surface, between the first portion and the second portion, inclined at a second angle smaller than the first angle, and an end portion of the second surface on the side wall side of the pressure chamber overlaps the side wall of the pressure chamber.

Abstract: A piezoelectric device includes a vibration plate, and a first piezoelectric element and a second piezoelectric element that vibrate the vibration plate. The first piezoelectric element and the second piezoelectric element include a piezoelectric layer extending between the first piezoelectric element and the second piezoelectric element. In a region between the first piezoelectric element and the second piezoelectric element in the piezoelectric layer, a first opening portion and a second opening portion are formed in a second direction intersecting a first direction in which the first piezoelectric element and the second piezoelectric element are disposed so as to interpose a vibration suppressing portion, which is a portion of the piezoelectric layer.

Abstract: A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Abstract: A liquid ejecting head includes a flow path substrate in which a nozzle through which liquid is ejected, a pressure chamber that communicates with the nozzle and a liquid supply chamber that communicates with the pressure chamber are formed, a vibration plate that is installed on the flow path substrate and overlaps with the pressure chamber and the liquid supply chamber, and a piezoelectric element that is formed on the vibration plate on an opposite side from the pressure chamber, in which a portion of the vibration plate overlapping with the pressure chamber is thinner in a thickness than a portion of the vibration plate overlapping with the liquid supply chamber.

Abstract: Provided is a piezoelectric element including: a first electrode; a piezoelectric layer which is provided over the first electrode; and a second electrode provided on a side of the piezoelectric layer opposite to the first electrode, in which the second electrode includes a first layer which is provided on the piezoelectric layer side, and a second layer which is provided on a side of the first layer opposite to the piezoelectric layer, and the second layer does not contain platinum and covers an end portion of the first layer.

Abstract: The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3): 0.41?Cr1?0.81??(1) 0.1?Cr1?Cr2?0.3??(2) Cr1>Cr2??(3).

Abstract: A piezoelectric device including a pressure chamber, a piezoelectric element, and a vibration plate, in which the piezoelectric element is provided with a first electrode, a second electrode, and a piezoelectric layer, the vibration plate has a first portion overlapping the piezoelectric element and a second portion having a thickness smaller than that of the first portion and overlapping an inner peripheral surface of a side wall of the pressure chamber, a side surface of the piezoelectric element which intersects the vibration plate has a first surface inclined at a first angle, the vibration plate has a second surface, between the first portion and the second portion, inclined at a second angle smaller than the first angle, and an end portion of the second surface on the side wall side of the pressure chamber overlaps the side wall of the pressure chamber.

Abstract: Provided is a piezoelectric device including: a substrate (10) on which a plurality of recesses (12) are provided; a vibrating plate (50) which is provided on one surface side of the substrate; and a piezoelectric element (300) which is provided over the vibrating plate (50) and on which a first electrode (60), a piezoelectric layer (70), and a second electrode (80) are laminated from the substrate (10) side, in which the first electrode (60) is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (12), and the piezoelectric layer (70) is extended to the outer side of the first electrode (60) in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess (12) in the parallel arrangement direction, the vibrating plate (50) contains a zirconium oxide layer (52), and when an area of the zirconium oxide layer (52) corres

Abstract: A piezoelectric device includes a substrate in which a plurality of spaces are arranged so as to be partitioned by a plurality of walls, and a defining member defining a portion of each of the spaces in such a way as to cross between adjacent walls being among the walls and corresponding to the each of the spaces on one face of the substrate, a plurality of piezoelectric elements formed in such a way as to be each associated with a corresponding one of the spaces. a width of each of the walls denoted by a sign a, a height of each of the walls denoted by a sign b, a thickness of the defining member denoted by a sign t, and a size of each of movable regions denoted by the sign L satisfy a formula, t×L4/(a×b3)?5×105.