Abstract: In a method of an embodiment, a pressure sensor is selected from first and second pressure sensors according to a set flow rate. A measurable maximum pressure of the second pressure sensor is higher than a measurable maximum pressure of first pressure sensor. The target pressure of a chamber is determined according to the set flow rate. Until the pressure of the chamber reaches the target pressure after gas is started to be output from the flow rate controller to the chamber at an output flow rate according to the set flow rate and a pressure controller provided between the chamber and an exhaust apparatus is closed, the pressure of the chamber is measured by the selected pressure sensor. The output flow rate of the flow rate controller is determined from a rate of rise of the pressure of the chamber.

Abstract: In a method of an embodiment, a pressure sensor is selected from first and second pressure sensors according to a set flow rate. A measurable maximum pressure of the second pressure sensor is higher than a measurable maximum pressure of first pressure sensor. The target pressure of a chamber is determined according to the set flow rate. Until the pressure of the chamber reaches the target pressure after gas is started to be output from the flow rate controller to the chamber at an output flow rate according to the set flow rate and a pressure controller provided between the chamber and an exhaust apparatus is closed, the pressure of the chamber is measured by the selected pressure sensor. The output flow rate of the flow rate controller is determined from a rate of rise of the pressure of the chamber.

Abstract: A motor drive control circuit includes a rotation control amplifier that compares the lower of a voltage limiting reference voltage of a reference voltage source and a rotation speed control voltage, which controls the rotation speed of the motor, on a terminal with a peak voltage from an impedance element that detects a drive current of a motor. The motor drive control circuit further includes a rotation limiting comparator that compares a voltage that is substantially equal to the voltage limiting reference voltage with the peak voltage, a synthesis circuit that amplifies rotation position detection signals from the motor according to the output voltage of the rotation control amplifier, a PWM output comparator that compares the outputs of the synthesis circuit with a triangular wave voltage and outputs PWM signals, and a motor-driver control circuit that removes an output period of the rotation limiting comparator from the ON period of each PWM signal and controls a motor driver that drives the motor.

Abstract: In a motor driving circuit in which a first NMOS and a second NMOS coupled in series to the final output stage to drive a motor are driven and a common node of the source of the first NMOS and the drain of the second NMOS serves as the final output, the motor driving circuit comprises: a first PMOS and a third NMOS having a common node of drains thereof coupled to the gate of the first NMOS; a second PMOS and a fourth NMOS having a common node of drains thereof coupled to the gate of the third NMOS; one or more PMOSs having drains coupled to the gate of the third NMOS which are turned on to charge the gate capacity of the third NMOS when the final output is low and a returned off when gate capacity of the third NMOS is charged; and one or more NMOSs having drains coupled to the gate of the third NMOS which are turned on to discharge the gate capacity of the third NMOS when the final output is high and are turned off when the gate capacity of the third NMOS is discharged and is characterized in that the gate o

Abstract: A motor drive control circuit includes a rotation control amplifier that compares the lower of a voltage limiting reference voltage of a reference voltage source and a rotation speed control voltage, which controls the rotation speed of the motor, on a terminal with a peak voltage from an impedance element that detects a drive current of a motor. The motor drive control circuit further includes a rotation limiting comparator that compares a voltage that is substantially equal to the voltage limiting reference voltage with the peak voltage, a synthesis circuit that amplifies rotation position detection signals from the motor according to the output voltage of the rotation control amplifier, a PWM output comparator that compares the outputs of the synthesis circuit with a triangular wave voltage and outputs PWM signals, and a motor-driver control circuit that removes an output period of the rotation limiting comparator from the ON period of each PWM signal and controls a motor driver that drives the motor.

Abstract: In a motor driving circuit in which a first NMOS and a second NMOS coupled in series to the final output stage to drive a motor are driven and a common node of the source of the first NMOS and the drain of the second NMOS serves as the final output, the motor driving circuit comprises: a first PMOS and a third NMOS having a common node of drains thereof coupled to the gate of the first NMOS; a second PMOS and a fourth NMOS having a common node of drains thereof coupled to the gate of the third NMOS; one or more PMOSs having drains coupled to the gate of the third NMOS which are turned on to charge the gate capacity of the third NMOS when the final output is low and a returned off when gate capacity of the third NMOS is charged; and one or more NMOSs having drains coupled to the gate of the third NMOS which are turned on to discharge the gate capacity of the third NMOS when the final output is high and are turned off when the gate capacity of the third NMOS is discharged and is characterized in that the gate o