Abstract: A gas analyzer includes an optical emitter that irradiates measurement light into a measurement region including a measured-gas, a first optical receiver that receives the measurement light passing through the measurement region, a splitting unit between the optical emitter and the measurement region that splits off a portion of the measurement light irradiated from the optical emitter to yield reference light, a reference unit, and an optical component. The reference unit holds a gas containing a measurement target component identical with the measured-gas but at a known concentration and a second optical receiver that receives the reference light passing through the region including the gas. The optical component is disposed between the splitting unit and the region and expands the beam diameter of the reference light to be larger at the second optical receiver than the receiving diameter of the second optical receiver.

Abstract: A gas analyzer includes an optical emitter that irradiates measurement light into a measurement region including a measured-gas, a first optical receiver that receives the measurement light passing through the measurement region, a splitting unit between the optical emitter and the measurement region that splits off a portion of the measurement light irradiated from the optical emitter to yield reference light, a reference unit, and an optical component. The reference unit holds a gas containing a measurement target component identical with the measured-gas but at a known concentration and a second optical receiver that receives the reference light passing through the region including the gas. The optical component is disposed between the splitting unit and the region and expands the beam diameter of the reference light to be larger at the second optical receiver than the receiving diameter of the second optical receiver.

Abstract: A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

Abstract: A gas concentration analyzer includes: a light emitting module configured to emit a laser light with which an ethylene gas that is a measurement target gas is irradiated; a light receiving module configured to receive the laser light that has passed through the measurement target gas to output a light receiving signal; and a calculation controller configured to calculate an absorption spectrum of the laser light using the light receiving signal, and to calculate amounts of methane and amounts of ethane in the ethylene gas that is the measurement target gas based on the absorption spectrum, wherein the laser light with which the measurement target gas is irradiated is included in a wavelength region with a wavelength of 3.42 ?m or more and 3.71 ?m or less.

Abstract: A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

Abstract: A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

Abstract: A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

Abstract: The invention provides a method of cleaning probes, capable of simplifying a cleaning process without causing a damage to the probes, and a cleaning system for use in carrying out the method. A cylindrical body supported so as to be opposed to a probe card with probes formed thereon is provided with an ultrasonic vibrator and an ultrasonic wave generation device for causing the ultrasonic vibrator to undergo ultrasonic vibration. By causing the ultrasonic vibrator to undergo ultrasonic vibration by the agency of the ultrasonic wave generation device, a standing wave comprising nodes and antinodes occurring in concentric circles is generated inside the cylindrical body.

Abstract: There is provided a probe card for testing a wafer as a whole, wherein parts of probes can be repaired, and adequately secure bonding of the probes with pads is enabled. The probe card for testing a plurality of semiconductor integrated circuits formed on a semiconductor wafer comprises a plurality of the probes for connection with respective testing electrodes of the semiconductor wafer; and wiring board having the pads to be connected with the respective probes. Each of fixed parts where the probes are connected with the respective pads is provided with a hole in order to prevent heat caused by soldering from being conducted to the probes.

Abstract: In a probe card for testing a plurality of semiconductor integrated circuits formed on a semiconductor wafer in a lump, only a faulty probe can be repaired without removing all probes from a wiring board. The probe card comprises a plurality of probes to be connected to respective testing electrodes formed on the semiconductor wafer, and wiring means provided with pads to be jointed to the probes, wherein the pads is formed on the upper surface of the wiring board.

Abstract: The invention provides a method of cleaning probes, capable of simplifying a cleaning process without causing a damage to the probes, and a cleaning system for use in carrying out the method. A cylindrical body supported so as to be opposed to a probe card with probes formed thereon is provided with an ultrasonic vibrator and an ultrasonic wave generation device for causing the ultrasonic vibrator to undergo ultrasonic vibration. By causing the ultrasonic vibrator to undergo ultrasonic vibration by the agency of the ultrasonic wave generation device, a standing wave comprising nodes and antinodes occurring in concentric circles is generated inside the cylindrical body.

Abstract: A method of lining up micro-balls on an arraying jig includes removing an excess of the micro-balls located thereat with ease. The micro-balls are supplied onto the arraying jig having a plurality of array holes formed therein. A cylindrical body is disposed above the arraying jig, and the micro-balls are maintained at the array holes by an air vacuum through the array holes of the arraying jig. A standing wave having nodes formed concentrically is generated inside the cylindrical body by subjecting the cylindrical body to ultrasonic vibration, so that the micro-balls are concentrated at the nodes of the standing wave. By moving the cylindrical body horizontally over the arraying jig while maintaining the ultrasonic vibration, the micro-balls are distributed into the respective array holes.