Abstract: When X-rays are projected to an X-ray sensor through a grid, a pitch of slits on the grid has a relationship such that a length obtained by multiplying an odd number to a half pitch of a projection image on the X-ray sensor is equal to a pitch of detection pixels of the X-ray sensor. X-rays passing through a sample to be measured via the grid are detected by the X-ray sensor. Levels of the detected X-ray detection signals are inputted into an operation process portion and subjected to an equalizing process for every pixel groups, each having even number of the detection pixels, continuously lined up in a pitch direction of the grid. As a result, irregularities of the levels of the X-ray detection signals can be corrected, and moires generated on an output screen of an image display portion can be removed.

Abstract: A two-dimensional array type detecting device of the invention is formed of a detecting side substrate, and a readout side substrate laminated together. In the detecting side substrate, a high resistivity responsive semiconductor film is laminated on a substrate through a common electrode therebetween, and semiconductor films for connection are formed for the respective sections corresponding to a two-dimensional array arrangement. Therefore, leak and expansion of carriers produced in the high resistivity responsive semiconductor are prevented in a direct conversion system, wherein light or radiation enters from a side of the glass substrate, in which the common electrode is not formed. Thus, a detecting sensitivity and space resolution can be improved. Namely, a dynamic range is large, and a crosstalk is small.

Abstract: When X-rays are projected to an X-ray sensor through a grid, a pitch of the grid has a relationship such that a length of multiplying an odd number to a half pitch of a projection image is equal to a pitch of detection pixels of the X-ray sensor. X-rays passing through a sample to be measured via the grid are detected by the X-ray sensor. Levels of the detected X-ray detection signals are inputted into an operation process portion and subjected to an equalizing process for every even number detection pixel group continuously lined up in a pitch direction of the grid, i.e. with a combination of a high value and a low value of the levels of the X-ray detection signals, as a unit. As a result, irregularities of the levels of the X-ray detection signals can be corrected, and moires generated on an output screen of an image display portion can be removed.