Abstract: Provided is a method for depositing a metal thin film by atomic layer deposition (ALD) using an organometallic complex as a source material and without using radical species such as plasma and ozone, which have a possibility of deactivation. The method is an atomic layer deposition (ALD) method for metal thin films which includes: a process of supplying an organometallic complex having an aromatic anionic ligand and/or an alkyl ligand into a reaction chamber in which a substrate is installed; and a process of supplying a mixture gas containing a nucleophilic gas and an electrophilic gas into the reaction chamber, the ALD method substantially not using either one of a gas in a plasma or radical state and a gas containing oxygen atoms.

Abstract: Provided is a method for depositing a metal thin film by atomic layer deposition (ALD) using an organometallic complex as a source material and without using radical species such as plasma and ozone, which have a possibility of deactivation. The method is an atomic layer deposition (ALD) method for metal thin films which includes: a process of supplying an organometallic complex having an aromatic anionic ligand and/or an alkyl ligand into a reaction chamber in which a substrate is installed; and a process of supplying a mixture gas containing a nucleophilic gas and an electrophilic gas into the reaction chamber, the ALD method substantially not using either one of a gas in a plasma or radical state and a gas containing oxygen atoms.

Abstract: Provided is a method for depositing a metal thin film by atomic layer deposition (ALD) using an organometallic complex as a source material and without using radical species such as plasma and ozone, which have a possibility of deactivation. The method is an atomic layer deposition (ALD) method for metal thin films which includes: a process of supplying an organometallic complex having an aromatic anionic ligand and/or an alkyl ligand into a reaction chamber in which a substrate is installed; and a process of supplying a mixture gas containing a nucleophilic gas and an electrophilic gas into the reaction chamber, the ALD method substantially not using either one of a gas in a plasma or radical state and a gas containing oxygen atoms.

Abstract: In a gas liquefaction plant that produces a liquefied gas by liquefying a raw gas, a pipe rack portion in which an air-cooling heat exchanging system is disposed has a rectangular shape when viewed from above. A first compressor, a precooling heat exchanging portion, an auxiliary heat exchanging portion, and a fourth compressor are arranged in this order along one long side of the pipe rack portion. A second compressor, a primary heat exchanging portion, and a third compressor are arranged in this order along the other long side of the pipe rack portion. A pipe that carries the raw gas cooled at the precooling heat exchanging portion is connected to the primary heat exchanging portion across the pipe rack portion. A pipe that carries a primary refrigerant compressed at the second and third compressors is connected to the auxiliary heat exchanging portion across the pipe rack portion.

Abstract: A liquefied gas production facility includes a plurality of liquefied gas producers which produce liquefied gas by removing an unnecessary substance and liquefying feed gas containing methane as a main component.

Abstract: In a gas liquefaction plant that produces a liquefied gas by liquefying a raw gas, a pipe rack portion in which an air-cooling heat exchanging system is disposed has a rectangular shape when viewed from above. A first compressor, a precooling heat exchanging portion, an auxiliary heat exchanging portion, and a fourth compressor are arranged in this order along one long side of the pipe rack portion. A second compressor, a primary heat exchanging portion, and a third compressor are arranged in this order along the other long side of the pipe rack portion. A pipe that carries the raw gas cooled at the precooling heat exchanging portion is connected to the primary heat exchanging portion across the pipe rack portion. A pipe that carries a primary refrigerant compressed at the second and third compressors is connected to the auxiliary heat exchanging portion across the pipe rack portion.

Abstract: A liquefied gas production facility includes a plurality of liquefied gas producers which produce liquefied gas by removing an unnecessary substance and liquefying feed gas containing methane as a main component.

Abstract: A steering device includes an outer column including fastening pieces formed to face each other at both sides, in the width direction, of a slot portion formed at either of a lower side or an upper side of an embracing body portion along an axial direction thereof, a fixed bracket clamping the outer column, a fastener that fastens the outer column and the fixed bracket, an inner column, and a pushing member having an expanding shaft portion. The two fastening pieces of the embracing body portion are connected by the fastener so that the two fastening pieces can be expanded and contracted, and the expanding shaft portion is elastically biased in an axial center direction of the outer column so as to abut on end zones of the slot portion and expand the two fastening pieces.

Abstract: Provided is a steering device in which play of a bolt shaft and the like during telescopic adjustment can be prevented using a telescopic adjustment function enabling a driver to adjust a position of a steering wheel in a front-rear direction. The steering device includes a column pipe, an outer housing, a fixed bracket, a stopper bracket, a tightening member having a bolt shaft, a slide guide, an elastic stopper rubber material mounted on the slide guide, and an elastic pushing member in which torsional coil spring portions are formed at both axial ends of a pushing shaft portion. The bolt shaft is passed through a tightening hole of the outer housing and a support hole of the fixed bracket along shaft support portions of the slide guide, and the elastic pushing member is locked and fixed to the fixed bracket.

Abstract: A steering apparatus includes a fixed bracket, an outer column, an arm unit, an inner column, a steering shaft, and a tightening tool. The outer column includes a main holding body portion, a divided portion, and a tightening portion. The arm unit includes by a bifurcated arm portion that extends axially outward in a substantially bifurcated shape at the axial front side of the main holding body portion and a linking portion formed between the arms of the bifurcated arm portion. The inner column is held by the outer column. The steering shaft is pivotally supported by the linking portion. Two tightening plate pieces of the tightening portion are disposed inside two fixed side portions of the fixed bracket and tightenably connected by the tightening tool.

Abstract: A steering device includes an outer column including fastening pieces formed to face each other at both sides, in the width direction, of a slot portion formed at either of a lower side or an upper side of an embracing body portion along an axial direction thereof, a fixed bracket clamping the outer column, a fastener that fastens the outer column and the fixed bracket, an inner column, and a pushing member having an expanding shaft portion. The two fastening pieces of the embracing body portion are connected by the fastener so that the two fastening pieces can be expanded and contracted, and the expanding shaft portion is elastically biased in an axial center direction of the outer column so as to abut on end zones of the slot portion and expand the two fastening pieces.

Abstract: Provided is a steering device in which play of a bolt shaft and the like during telescopic adjustment can be prevented using a telescopic adjustment function enabling a driver to adjust a position of a steering wheel in a front-rear direction. The steering device includes a column pipe, an outer housing, a fixed bracket, a stopper bracket, a tightening member having a bolt shaft, a slide guide, an elastic stopper rubber material mounted on the slide guide, and an elastic pushing member in which torsional coil spring portions are formed at both axial ends of a pushing shaft portion. The bolt shaft is passed through a tightening hole of the outer housing and a support hole of the fixed bracket along shaft support portions of the slide guide, and the elastic pushing member is locked and fixed to the fixed bracket.

Abstract: An object of the present invention is to markedly increase the tilt holding force of a tilt telescopic column. A tilt telescopic steering device includes: a fixed bracket 1 fixed to a vehicle; a movable bracket 2 capable of moving relative to the fixed bracket 1; an intermediate bracket 3 which movably supports the movable bracket 2 in an axial direction, is rotatably pivoted on the fixed bracket 1 and is provided with a bearing 301 for rotatably supporting a steering shaft 101; a lock shaft 4 for tiltably and telescopicably fixing the fixed bracket 1 and the movable bracket 2 at a predetermined position; and a connecting shaft 5 for telescopicably fixing the movable bracket 2 and the intermediate bracket 3.

Abstract: The present invention provides a steering apparatus which has increased rigidity in a fixed state of the steering column after positioning performed by tilt and telescopic adjustment, and in which a play is inhibited and operation feeling of steering is improved. The steering apparatus includes a fixed bracket, an outer column, an arm unit, an inner column, a steering shaft, and a tightening tool. The outer column is constituted by a main holding body portion, a divided portion, and a tightening portion. The arm unit is constituted by a bifurcated arm portion that extends axially outward in a substantially bifurcated shape at the axial front side of the main holding body portion and a linking portion formed between the arms of the bifurcated arm portion. The inner column is held by the outer column. The steering shaft is pivotally supported by the linking portion.

Abstract: An object of the present invention is to markedly increase the tilt holding force of a tilt telescopic column. A tilt telescopic steering device includes: a fixed bracket 1 fixed to a vehicle; a movable bracket 2 capable of moving relative to the fixed bracket 1; an intermediate bracket 3 which movably supports the movable bracket 2 in an axial direction, is rotatably pivoted on the fixed bracket 1 and is provided with a bearing 301 for rotatably supporting a steering shaft 101; a lock shaft 4 for tiltably and telescopicably fixing the fixed bracket 1 and the movable bracket 2 at a predetermined position; and a connecting shaft 5 for telescopicably fixing the movable bracket 2 and the intermediate bracket 3.

Abstract: A gas liquefaction plant includes a pre-cooling exchanger which pre-cools a feed gas by means of indirect heat exchange with a first refrigerant; a first refrigerant compressor which compresses the first refrigerant which has been used for refrigerating the feed gas in the pre-cooling exchanger; a cryogenic heat exchanger which refrigerates and liquefies the feed gas which has been pre-cooled by the pre-cooling exchanger by means of indirect heat exchange with a second refrigerant; a second refrigerant compressor which refrigerates the second refrigerant which has been used for cooling and liquefying the feed gas in the cryogenic heat exchanger; and a piping complex which receives piping used in the gas liquefaction plant, wherein the pre-cooling exchanger, the first refrigerant compressor, the cryogenic heat exchanger, and the second refrigerant compressor are installed at one side of the piping complex.

Abstract: A gas liquefaction plant includes a pre-cooling exchanger which pre-cools a feed gas by means of indirect heat exchange with a first refrigerant; a first refrigerant compressor which compresses the first refrigerant which has been used for refrigerating the feed gas in the pre-cooling exchanger; a cryogenic heat exchanger which refrigerates and liquefies the feed gas which has been pre-cooled by the pre-cooling exchanger by means of indirect heat exchange with a second refrigerant; a second refrigerant compressor which refrigerates the second refrigerant which has been used for cooling and liquefying the feed gas in the cryogenic heat exchanger; and a piping complex which receives piping used in the gas liquefaction plant, wherein the pre-cooling exchanger, the first refrigerant compressor, the cryogenic heat exchanger, and the second refrigerant compressor are installed at one side of the piping complex.