Abstract: Actual coordinate system data is acquired on the basis of a coordinate position at which a coordinate system generating tool attached to a robot is brought into proximity to, or contact to a coordinate system generating target of a coordinate system generating unit attached to a work piece positioning device. Simulation teaching data of a movement trajectory of a welding gun and design coordinate system data based on a design coordinate value of a coordinate system generating target are acquired by using a virtual model. After the actual coordinate system data is acquired into an information processing system, a coordinate position of the simulation teaching data is then moved to match the design coordinate system data with the actual coordinate system data.

Abstract: Substrate aluminum detection means (33a) irradiates a substrate (11) before film formation with primary X-rays from a measurement head (23) and detects fluorescent X-rays generated from the substrate (11) by the measurement head (23) to detect an aluminum component contained in the substrate (11). When an aluminum film is formed on the substrate (11), aluminum film correction means (33b) corrects intensity of fluorescent X-rays detected from the aluminum film by the measurement head (23) based on a detection result of the substrate aluminum detection means (33a) to obtain thickness of the aluminum film.

Abstract: A measurement head (23) irradiates a film (12) of a product substrate (10) with primary X-rays to detect fluorescent X-rays generated from the film (12). Analysis means (33) obtains thickness of the film (12) from intensity of the fluorescent X-rays detected by the measurement head (23).