Patents by Inventor Nathan SPIKER
Nathan SPIKER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11972965Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: GrantFiled: February 15, 2022Date of Patent: April 30, 2024Assignee: Brooks Automation US, LLCInventors: Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang
-
Publication number: 20240112937Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: ApplicationFiled: October 3, 2023Publication date: April 4, 2024Inventors: Bing YIN, Jairo MOURA, Vincent TSANG, Aaron GAWLIK, Nathan SPIKER
-
Publication number: 20240085481Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: ApplicationFiled: November 21, 2023Publication date: March 14, 2024Inventors: Jairo T. MOURA, Nathan SPIKER, Aaron GAWLIK, Jayaraman KRISHNASAMY
-
Patent number: 11821953Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: GrantFiled: November 23, 2021Date of Patent: November 21, 2023Assignee: Brooks Automation US, LLCInventors: Jairo T Moura, Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy
-
Patent number: 11776834Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: GrantFiled: April 13, 2021Date of Patent: October 3, 2023Assignee: Brooks Automation US, LLCInventors: Bing Yin, Jairo Moura, Vincent Tsang, Aaron Gawlik, Nathan Spiker
-
Publication number: 20220172973Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: ApplicationFiled: February 15, 2022Publication date: June 2, 2022Inventors: Jairo T. MOURA, Robert T. CAVENEY, Bing ` YIN, Nathan SPIKER, Vincent W. TSANG
-
Publication number: 20220155372Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: ApplicationFiled: November 23, 2021Publication date: May 19, 2022Inventors: Jairo T. Moura, Nathan SPIKER, Aaron GAWLIK, Jayaraman KRISHNASAMY
-
Patent number: 11251059Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: GrantFiled: May 12, 2020Date of Patent: February 15, 2022Assignee: Brooks Automation, Inc.Inventors: Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang
-
Patent number: 11181582Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: GrantFiled: February 18, 2020Date of Patent: November 23, 2021Assignee: Brooks Automation, Inc.Inventors: Jairo T. Moura, Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy
-
Publication number: 20210305076Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: ApplicationFiled: April 13, 2021Publication date: September 30, 2021Inventors: Bing YIN, Jairo MOURA, Vincent TSANG, Aaron GAWLIK, Nathan SPIKER
-
Patent number: 10978330Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: GrantFiled: November 20, 2018Date of Patent: April 13, 2021Assignee: Brooks Automation, Inc.Inventors: Bing Yin, Jairo T. Moura, Vincent Tsang, Aaron Gawlik, Nathan Spiker
-
Publication number: 20200273734Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: ApplicationFiled: May 12, 2020Publication date: August 27, 2020Inventors: Jairo T. MOURA, Robert T. CAVENEY, Bing YIN, Nathan SPIKER, Vincent W. TSANG
-
Publication number: 20200256919Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: ApplicationFiled: February 18, 2020Publication date: August 13, 2020Inventors: Jairo T. MOURA, Nathan SPIKER, Aaron GAWLIK, Jayaraman KRISHNASAMY
-
Patent number: 10651067Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: GrantFiled: January 25, 2018Date of Patent: May 12, 2020Assignee: BROOKS AUTOMATION, INC.Inventors: Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang
-
Patent number: 10564221Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: GrantFiled: November 13, 2014Date of Patent: February 18, 2020Assignee: BROOKS AUTOMATION, INC.Inventors: Jairo T. Moura, Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy
-
Publication number: 20190164800Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: ApplicationFiled: November 20, 2018Publication date: May 30, 2019Inventors: Bing YIN, Jairo T. MOURA, Vincent TSANG, Aaron GAWLIK, Nathan SPIKER
-
Patent number: 10134623Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: GrantFiled: July 13, 2016Date of Patent: November 20, 2018Assignee: Brooks Automation, Inc.Inventors: Bing Yin, Jairo T. Moura, Vincent Tsang, Aaron Gawlik, Nathan Spiker
-
Publication number: 20180286728Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: ApplicationFiled: January 25, 2018Publication date: October 4, 2018Inventors: Jairo T. MOURA, Robert T. CAVENEY, Bing ` YIN, Nathan SPIKER, Vincent W. TSANG
-
Publication number: 20170018446Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.Type: ApplicationFiled: July 13, 2016Publication date: January 19, 2017Inventors: Bing YIN, Jairo T. MOURA, Vincent TSANG, Aaron GAWLIK, Nathan SPIKER
-
Publication number: 20150168496Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.Type: ApplicationFiled: November 13, 2014Publication date: June 18, 2015Inventors: Jairo T. MOURA, Nathan SPIKER, Aaron GAWLIK, Jayaraman KRISHNASAMY