Patents by Inventor Natraj Narayanswani

Natraj Narayanswani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
    Patent number: 6578369
    Abstract: Improved nozzle design that discharges more powerful, more focused fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present invention may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of more forceful, more focused process streams are desired for treating microelectronic workpieces. The present invention is particularly useful to cryogenically clean microelectronic workpieces, where the improvements allow the conventionally more troublesome smaller contaminant particles to be cleaningly removed with greater particle removal efficiency.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: June 17, 2003
    Assignee: FSI International, Inc.
    Inventors: Pam Kunkel, Natraj Narayanswani, John C. Patrin