Abstract: A comb-drive actuator includes a stationary comb structure having stationary comb fingers interdigiated with comb fingers of a mobile comb structure. The comb fingers include a p-type layer and an n-type layer forming a diode junction in each finger. The diode junctions of either the stationary comb fingers or the mobile comb finger are reversed biased, while at least one layer of the other set of comb fingers is grounded. This creates an attractive electric field between the sets of fingers, causing the mobile comb structure to move. The mobile comb structure of the actuator can be aligned along the rotational axis of a movable element and attached at one end to the movable element and at the other end to a flexure. The comb fingers can also be shaped to provide multi-gap and/or variable gap configurations between the stationary and mobile comb structures.

Abstract: A vertical electrostatic actuator is based on a layered structure consisting of two conducting or semiconducting layers separated by an insulating layer and/or layered structure consisting of p-type and n-type layers separated by a pn-junction. The number of conducting layers, p-type layers and/or n-type layers can be more than two as long as each two adjacent layers are separated by an insulating layer or a pn-junction. The mobile electrode of the actuator can be formed along a flexure in a micro-mechanical system. Two stationary electrodes are located on either side of the mobile electrode. The layered structure of the electrodes increases the torque on the flexure and thus improves the performance of the actuator. Fabrication methods for the electrostatic actuator and micro-mechanical systems employing the same are disclosed.

Abstract: A comb-drive actuator includes a stationary comb structure having stationary comb fingers interdigiated with comb fingers of a mobile comb structure. The comb fingers include a p-type layer and an n-type layer forming a diode junction in each finger. The diode junctions of either the stationary comb fingers or the mobile comb finger are reversed biased, while at least one layer of the other set of comb fingers is grounded. This creates an attractive electric field between the sets of fingers, causing the mobile comb structure to move. The mobile comb structure of the actuator can be aligned along the rotational axis of a movable element and attached at one end to the movable element and at the other end to a flexure. The comb fingers can also be shaped to provide multi-gap and/or variable gap configurations between the stationary and mobile comb structures.

Abstract: Novel light switches and attenuators are disclosed. In one form of the invention, a novel 1×2 switch is formed by positioning a moveable cantilever mirror having an opening intermediate three fiberoptic lines. In another form of the invention, a novel n×n switch is formed by positioning a moveable cantilever mirror having n openings intermediate n sets of three fiberoptic lines. In still another form of the invention, a novel variable optical attenuator is formed by incrementally positioning a moveable cantilever mirror having an opening intermediate a set of three fiberoptic lines.