Patents by Inventor Niall Brennan

Niall Brennan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROCESSING OF MULTILAYER SEMICONDUCTOR WAFERS
    Publication number: 20110177674
    Abstract: A method and apparatus for machining, or forming a feature in, a patterned silicon wafer includes removing portions of surface layers on the wafer using a first pulsed laser (4) beam with a pulse width between 1 ps and 1000 ps; and removing portions of bulk silicon (1) underlying the surface layers from the wafer using a second pulsed laser (5) beam with a wavelength between 200 nm and 1100 nm. Re-deposited silicon may be removed from the wafer by etching.
    Type: Application
    Filed: March 16, 2009
    Publication date: July 21, 2011
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Aleksej Rodin, Adrian Boyle, Niall Brennan, Joseph Callaghan