Patents by Inventor Nicholas Jeffries Clecak

Nicholas Jeffries Clecak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for imaging of photoresist
    Patent number: 6277546
    Abstract: The present invention relates to an improved lithographic imaging process for use in the manufacture of integrated circuits. The process provides protection to the photoresist film from airborne chemical contaminants.
    Type: Grant
    Filed: November 28, 1994
    Date of Patent: August 21, 2001
    Assignee: International Business Machines Corporation
    Inventors: Gregory Breyta, Nicholas Jeffries Clecak, William Dinan Hinsberg, III, Donald Clifford Hofer, Hiroshi Ito, Scott Arthur MacDonald, Ratnam Sooriyakumaran