Abstract: A method of controlling a chemical reaction is disclosed. The method may include feeding a solution at a first flow rate into a reactor and detecting a sound in the reactor using a sound sensor that is adjacent to the reactor. The sound sensor may convert the sound into a sound signal. After the sound signal is acquired, it is compared to a stored sound signal or a stored sound threshold to detect a reaction event. The method may include adjusting the flow rate of solutions into the reactor in response to the reaction event.

Abstract: A method of producing chlorine dioxide is disclosed. The method may include feeding a reaction mixture into a separator. The reaction mixture may follow a helical path through the separator and produce gaseous chlorine dioxide within the separator. Gaseous chlorine dioxide may be withdrawn from the separator and used to disinfect process water.

Abstract: A method of producing chlorine dioxide is disclosed. The method may include feeding a reaction mixture into a separator. The reaction mixture may follow a helical path through the separator and produce gaseous chlorine dioxide within the separator. Gaseous chlorine dioxide may be withdrawn from the separator and used to disinfect process water.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of peracetic acid is disclosed. The peracetic acid is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses peracetic acid in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: A method of producing chlorine dioxide is disclosed. The method may include feeding a reaction mixture into a separator. The reaction mixture may follow a helical path through the separator and produce gaseous chlorine dioxide within the separator. Gaseous chlorine dioxide may be withdrawn from the separator and used to disinfect process water.

Abstract: Additives including sulfur-containing compounds are used in methods of treating synthetic gypsum. The additives can thermally stabilize heavy metals, such as mercury. This thermal stabilization reduces mercury release from the synthetic gypsum. Illustrative, non-limiting examples of sulfur-containing compounds include inorganic sulfides, organic sulfides, organic compounds containing nitrogen and sulfur, organic compounds containing oxygen and sulfur, and polymers containing sulfur.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or off-gases having mercury with the use of hypoiodite is disclosed. The hypoiodite is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses hypoiodite in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: Additives including sulfur-containing compounds are used in methods of treating synthetic gypsum. The additives can thermally stabilize heavy metals, such as mercury. This thermal stabilization reduces mercury release from the synthetic gypsum. Illustrative, non-limiting examples of sulfur-containing compounds include inorganic sulfides, organic sulfides, organic compounds containing nitrogen and sulfur, organic compounds containing oxygen and sulfur, and polymers containing sulfur.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of peracetic acid is disclosed. The peracetic acid is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses peracetic acid in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of peracetic acid is disclosed. The peracetic acid is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses peracetic acid in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of hypobromite is disclosed. The hypobromite is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses hypobromite in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: Methods and apparatus for in-situ cleaning of substrate processing chambers are provided herein. A substrate processing chamber may include a chamber body enclosing an inner volume; a chamber lid removably coupled to the chamber body and including a first flow channel fluidly coupled to the inner volume to selectively open or seal the inner volume to or from a first outlet; a chamber floor including a second flow channel fluidly coupled to the inner volume to selectively open or seal the inner volume to or from a first inlet; and a pump ring disposed in and in fluid communication with the inner volume, the pump ring comprising an upper chamber fluidly coupled to a lower chamber, and a second outlet fluidly coupled to the lower chamber to selectively open or seal the inner volume to or from the second outlet.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or off-gases having mercury with the use of hypoiodite is disclosed. The hypoiodite is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses hypoiodite in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of hypobromite is disclosed. The hypobromite is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses hypobromite in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: A method for the reduction and prevention of mercury emissions into the environment from combusted fossil fuels or other off-gases with the use of peracetic acid is disclosed. The peracetic acid is used for the capture of mercury from the resulting flue gases using a flue gas desulfurization system or scrubber. The method uses peracetic acid in conjunction with a scrubber to capture mercury and lower its emission and/or re-emission with stack gases. The method allows the use of coal as a cleaner and environmentally friendlier fuel source as well as capturing mercury from other processing systems.

Abstract: Described are apparatus and methods for processing semiconductor wafers so that a film can be deposited on the wafer and the film can be UV treated without the need to move the wafer to a separate location for treatment. The apparatus and methods include a window which is isolated from the reactive gases by a flow of an inert gas.

Abstract: Methods and apparatus for in-situ cleaning of substrate processing chambers are provided herein. A substrate processing chamber may include a chamber body enclosing an inner volume; a chamber lid removably coupled to the chamber body and including a first flow channel fluidly coupled to the inner volume to selectively open or seal the inner volume to or from a first outlet; a chamber floor including a second flow channel fluidly coupled to the inner volume to selectively open or seal the inner volume to or from a first inlet; and a pump ring disposed in and in fluid communication with the inner volume, the pump ring comprising an upper chamber fluidly coupled to a lower chamber, and a second outlet fluidly coupled to the lower chamber to selectively open or seal the inner volume to or from the second outlet.

Abstract: An apparatus and a method for depositing materials, and more particularly a vapor deposition chamber configured to deposit a material during a plasma-enhanced process are provided. In one embodiment a chamber comprises a chamber body defining a process volume, a substrate support disposed in the process volume and configured to support one or more substrates, a process lid assembly disposed over the substrate support, wherein the process lid assembly has a plasma cavity configured to generate a plasma and provide one or more radical species to the process volume, a RF (radio frequency) power source coupled to the gas distribution assembly, a plasma forming gas source coupled with the process lid assembly, and a reactant gas source coupled with the process lid assembly.

Abstract: Described are apparatus and methods for processing semiconductor wafers so that a film can be deposited on the wafer and the film can be UV treated without the need to move the wafer to a separate location for treatment. The apparatus and methods include a window which is isolated from the reactive gases by a flow of an inert gas.

Abstract: Embodiments of apparatus for providing plasma to a process chamber are provided. In some embodiments, an apparatus may include a first ground plate; an electrode disposed beneath and spaced apart from the first ground plate by a first electrical insulator to define a first gap between the first ground plate and the electrode; a second ground plate disposed beneath and spaced apart from the electrode by a second electrical insulator to define a second gap between the electrode and the second ground plate; a gas inlet to provide a process gas to the first gap; a plurality of through holes disposed through the electrode coupling the first gap to the second gap; and a plurality of first gas outlet holes disposed through the second ground plate to fluidly couple the second gap to an area beneath the second plate.