Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.

Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.

Abstract: A method and apparatus for controlling complex systems includes hierarchically coupled subsystems representing operative functions of the system. The hierarchically coupled subsystems are coupled to collect command data from a user and signal data from the system. Each subsystem may include one or more state machines and one or more digital signal processing and conditioning unit (DSPCU) objects. The DSCPU objects accept process commands and convert control system signals into states for further processing by the state machines. Associated with the DSPCUs of each subsystem is a data flow diagram for dictating an order of flow of commands and signals at the DSPCUs. A method of controlling the system represented by the hierarchically coupled subsystems schedules the execution of the subsystems according to an execution protocol.