Abstract: A radar metrology system is provided for use with a movement system (e.g., a robot arm) that moves an end tool, and includes mobile and stationary radar configurations. The mobile radar configuration includes mobile radar components that are coupled to the end tool or an end tool mounting configuration. The stationary radar configuration includes stationary radar components (e.g., that surround a volume in which the end tool is moved). As part of a calibration process, the mobile radar configuration is moved to a plurality of calibration positions, and received radar signals are utilized to determine distances between stationary radar components and one or more mobile radar components. The radar signals are either transmitted from stationary radar components and received by mobile radar components, or vice versa. The locations (e.g., coordinates) of the stationary radar components are determined based at least in part on the determined distances.

Abstract: A radar metrology system is provided for use with a movement system (e.g., a robot arm) that moves an end tool, and includes mobile and stationary radar configurations. The mobile radar configuration includes mobile radar components that are coupled to the end tool or an end tool mounting configuration. The stationary radar configuration includes stationary radar components (e.g., which define a metrology frame volume that surrounds a movement volume in which the end tool is moved). Distances are determined between stationary radar components and mobile radar components based at least in part on radar signals, wherein the distances indicate (e.g., and may be utilized to determine) a position and orientation (e.g., of the mobile radar configuration and/or end tool). The radar signals are either transmitted from stationary radar components and received by mobile radar components, or transmitted from mobile radar components and received by stationary radar components.

Abstract: A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).

Abstract: A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).

Abstract: An ultrashort-pulse compressor includes (a) one or more bulk-optics intersecting a propagation path of an ultrashort-pulsed laser beam multiple times to spectrally broaden a pulse of the laser beam during each of multiple passes through the bulk-optic(s), (b) one or more dispersive optics for compressing a duration of the pulse after each of the multiple passes, and (c) a plurality of focusing elements for focusing the laser beam between the multiple passes. Propagation distances between the bulk-optic(s) and the focusing elements are detuned from imaging such that a spot size of the laser beam, at the bulk-optic(s), is greater at each successive one of the multiple passes. As the laser beam propagates through this compressor, each laser pulse is alternatingly spectral broadened and temporally compressed. The increasing spot size of the laser, for each pass, helps prevent optical damage, run-away self-focusing, and other undesirable outcomes.