Patents by Inventor Nick Petrone

Nick Petrone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect inspection and review using transmissive current image of charged particle beam system
    Patent number: 11410830
    Abstract: A system is disclosed. In one embodiment, the system includes a scanning electron microscopy sub-system including an electron source configured to generate an electron beam and an electron-optical assembly including one or more electron-optical elements configured to direct the electron beam to the specimen. In another embodiment, the system includes one or more grounding paths coupled to the specimen, the one or more grounding paths configured to generate one or more transmission signals based on one or more received electron beam-induced transmission currents. In another embodiment, the system includes a controller configured to: generate control signals configured to cause the scanning electron microscopy sub-system to scan the portion of the electron beam across a portion of the specimen; receive the transmission signals via the one or more grounding paths; and generate transmission current images based on the transmission signals.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: August 9, 2022
    Assignee: KLA Corporation
    Inventors: Hong Xiao, Lawrence Muray, Nick Petrone, John Gerling, Abdurrahman Sezginer, Alan D. Brodie, Kuljit Virk, Qiang Q. Zhang, Grace Hsiu-Ling Chen