Patents by Inventor Nick Taylor

Nick Taylor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5855681
    Abstract: The present invention generally provides a cassette-to-cassette vacuum processing system which concurrently processes multiple wafers and combines the advantages of single wafer process chambers and multiple wafer handling for high quality wafer processing, high wafer throughput and reduced footprint. In accordance with one aspect of the invention, the system is preferably a staged vacuum system which generally includes a loadlock chamber for introducing wafers into the system and which also provides wafer cooling following processing, a transfer chamber for housing a wafer handler, and one or more processing chambers each having two or more processing regions which are isolatable from each other and preferably share a common gas supply and a common exhaust pump. The processing regions also preferably include separate gas distribution assemblies and RF power sources to provide a uniform plasma density over a wafer surface in each processing region.
    Type: Grant
    Filed: November 18, 1996
    Date of Patent: January 5, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Dan Maydan, Sasson Somekh, Ashok Sinha, Kevin Fairbairn, Christopher Lane, Kelly Colborne, Hari K. Ponnekanti, W. N.(Nick) Taylor