Patents by Inventor Nico Jouault

Nico Jouault has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas inlet member of a CVD reactor
    Patent number: 9587312
    Abstract: A gas inlet member of a CVD reactor includes a gas inlet housing having a gas distribution volume supplied with a process gas by a feed line and a multiplicity of gas lines, each formed as a tube and engaging openings of a gas outlet plate arranged in front of an inlet housing wall, and through which the process gas enters a process chamber. A coolant chamber adjoins the gas inlet housing wall and a coolant cools the gas inlet housing wall and outlet ends of the gas lines that are in heat-conductive contact with the gas inlet housing wall. The gas outlet plate is thereby thermally decoupled from the gas inlet housing wall such that the gas outlet plate, which is acted on by radiation heat coming from the process chamber, heats up more intensely than the outlet ends which extend into the openings of the gas outlet plate.
    Type: Grant
    Filed: July 5, 2012
    Date of Patent: March 7, 2017
    Assignee: AIXTRON SE
    Inventors: Hugo Silva, Nico Jouault, Victor Saywell, Fred Crawley, Martin Dauelsberg, Johannes Lindner
  • GAS INLET MEMBER OF A CVD REACTOR
    Publication number: 20150007771
    Abstract: A gas inlet member of a CVD reactor includes a gas inlet housing having a gas distribution volume supplied with a process gas by a feed line and a multiplicity of gas lines, each formed as a tube and engaging openings of a gas outlet plate arranged in front of an inlet housing wall, and through which the process gas enters a process chamber. A coolant chamber adjoins the gas inlet housing wall and a coolant cools the gas inlet housing wall and outlet ends of the gas lines that are in heat-conductive contact with the gas inlet housing wall. The gas outlet plate is thereby thermally decoupled from the gas inlet housing wall such that the gas outlet plate, which is acted on by radiation heat coming from the process chamber, heats up more intensely than the outlet ends which extend into the openings of the gas outlet plate.
    Type: Application
    Filed: July 5, 2012
    Publication date: January 8, 2015
    Applicant: AIXTRON SE
    Inventors: Hugo Silva, Nico Jouault, Victor Saywell, Fred Crawley, Martin Dauelsberg, Johannes Lindner