Abstract: The invention pertains to a method for predicting a failure in the rotation of the rotor of a vacuum pump, comprising the following steps: sequences of events related to the change over time of the vacuum pump functional signals are recorded (101), a match is sought between at least one sequence of events and at least one pre-established association rule precursory pattern of a vacuum pump behavior model within the recorded sequences of events, said pre-established association rule's precursory patterns involving a failure in the rotor rotation (102), and a time prediction window is deduced during which a failure in the rotor rotation will occur in a vacuum pump (103).

Abstract: The invention pertains to a method for predicting a failure in the rotation of the rotor of a vacuum pump, comprising the following steps: sequences of events related to the change over time of the vacuum pump functional signals are recorded (101), a match is sought between at least one sequence of events and at least one pre-established association rule precursory pattern of a vacuum pump behavior model within the recorded sequences of events, said pre-established association rule's precursory patterns involving a failure in the rotor rotation (102), and a time prediction window is deduced during which a failure in the rotor rotation will occur in a vacuum pump (103).

Abstract: The present invention provides a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least: a pump unit comprising a pump body and a motor; a gas exhaust system; first measurement means for measuring a functional parameter relating to the motor; second measurement means for measuring a functional parameter relating to the exhaust system; and prediction means for calculating the duration of use of the vacuum line. The prediction means calculate the duration of utilization of the vacuum line prior to failure of the pump unit from the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means. In a variant, the vacuum line further includes third measurement means for measuring a functional parameter relating to the pump body, and the prediction means calculate the duration of use while taking account of the measurement of this parameter.

Abstract: The present invention provides a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least: a pump unit comprising a pump body and a motor; a gas exhaust system; first measurement means for measuring a functional parameter relating to the motor; second measurement means for measuring a functional parameter relating to the exhaust system; and prediction means for calculating the duration of use of the vacuum line. The prediction means calculate the duration of utilization of the vacuum line prior to failure of the pump unit from the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means. In a variant, the vacuum line further includes third measurement means for measuring a functional parameter relating to the pump body, and the prediction means calculate the duration of use while taking account of the measurement of this parameter.