Abstract: A turbomolecular vacuum pump is provided, including: a stator; a rotor configured to rotate in the stator about an axis of rotation; and a regulation valve configured to modify an inlet conductance of the turbomolecular vacuum pump by axial displacement towards or away from a suction orifice of the turbomolecular vacuum pump, a face of the regulation valve facing the suction orifice having a hollow form.

Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Abstract: The present invention relates to the field of high rotation speed vacuum pumps, which are fastened to and connected to a structure such as a vacuum enclosure or a pipe to generate a hard vacuum. It consists in an annular fixing flange including holes cooperating with headed bolts to fasten a vacuum pump to a structure. The flange comprises an upper ring and a lower ring cooperating to clamp the end of the pump body between the upper ring and the lower ring, and at least one first cavity in a face of the upper ring that is in a plane perpendicular to that of the face of the upper ring intended to come into contact with the wall of the structure. The invention also consists in a fixing system comprising an annular flange disposed coaxially with the pump body around the inlet orifice of the pump.

Abstract: The present invention relates to the field of high rotation speed vacuum pumps, which are fastened to and connected to a structure such as a vacuum enclosure or a pipe to generate a hard vacuum. It consists in an annular fixing flange including holes cooperating with headed bolts to fasten a vacuum pump to a structure. The flange comprises an upper ring and a lower ring cooperating to clamp the end of the pump body between the upper ring and the lower ring, and at least one first cavity in a face of the upper ring that is in a plane perpendicular to that of the face of the upper ring intended to come into contact with the wall of the structure. The invention also consists in a fixing system comprising an annular flange disposed coaxially with the pump body around the inlet orifice of the pump.