Abstract: A semiconductor structure (10) has one or more air gaps (44, 46) formed on a same layer with an interlevel dielectric (ILD) (30) using a common dielectric material (16) that is photosensitive. Additional ILDs (124, 162) may be formed on the layer. The photosensitive material is exposed in a manner such that a portion of the material is modified by light to change the cross-linking characteristics such that uncross-linked portions are outgassed upon heating. Air gaps form from the outgassing of the unlinked portions. ILD side-pillars (58, 60) to the air gaps which are formed by mask sizing or lithographic alignment provide additional structural support for the air gaps.

Abstract: A process and system for forming a low dielectric film in a semiconductor fabrication process are disclosed. Initially, a carbon-doped silicon oxide film is deposited on a semiconductor wafer. Light energy, such as ultraviolet (UV) energy, is then applied to the deposited film to cure the film. In one embodiment, at least 30% of the light energy is at a frequency greater than that of visible light. In the preferred embodiment, the application of the light energy to the wafer does not significantly heat the wafer. The invention further contemplates a cluster tool or system suitable for forming and curing the dielectric film. The cluster tool includes a first chamber coupled to an organosilane source, a second chamber configured to apply light energy to a wafer received in the second chamber, and a robotic section suitable for controlling movement of wafers between the first chamber and the second chamber.